Semiconductor package and method manufacturing the same

ABSTRACT

A semiconductor package including an insulating encapsulation, an integrated circuit component, and conductive elements is provided. The integrated circuit component is encapsulated in the insulating encapsulation, wherein the integrated circuit component has at least one through silicon via protruding from the integrated circuit component. The conductive elements are located on the insulating encapsulation, wherein one of the conductive elements is connected to the at least one through silicon via, and the integrated circuit component is electrically connected to the one of the conductive elements through the at least one through silicon via.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation application of and claims thepriority benefit of a prior application Ser. No. 15/854,704, filed onDec. 26, 2017, which claims the priority benefit of U.S. provisionalapplication Ser. No. 62/527,047, filed on Jun. 30, 2017. The entirety ofeach of the above-mentioned patent applications is hereby incorporatedby reference herein and made a part of this specification.

BACKGROUND

Semiconductor devices are used in a variety of electronic applications,such as personal computers, cell phones, digital cameras, and otherelectronic equipment. Semiconductor devices are typically fabricated bysequentially depositing insulating or dielectric layers, conductivelayers, and semiconductor layers of material over a semiconductorsubstrate, and patterning the various material layers using lithographyto form circuit components and elements thereon. Many semiconductorintegrated circuits are typically manufactured on a single semiconductorwafer. Dies of the wafer may be processed and packaged at the waferlevel, and various technologies have been developed for wafer levelpackaging.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIG. 1 to FIG. 14 are schematic cross-sectional views of various stagesof manufacturing a semiconductor package in accordance with someexemplary embodiments of the disclosure.

FIG. 15 is a schematic enlarged cross-sectional view illustrating a partof the semiconductor package depicted in FIG. 14.

FIG. 16 is a schematic cross-sectional view of a semiconductor packagein accordance with some exemplary embodiments of the disclosure.

FIG. 17 is a schematic cross-sectional view of a semiconductor packagein accordance with some exemplary embodiments of the disclosure.

FIG. 18 is a schematic enlarged cross-sectional view illustrating a partof the semiconductor package depicted in FIG. 17.

FIG. 19 is a schematic enlarged cross-sectional view illustrating a partof the semiconductor package in accordance with some exemplaryembodiments of the disclosure.

FIG. 20 is a schematic enlarged cross-sectional view illustrating a partof the semiconductor package in accordance with some exemplaryembodiments of the disclosure.

FIG. 21 is a schematic enlarged cross-sectional view illustrating a partof the semiconductor package in accordance with some exemplaryembodiments of the disclosure.

FIG. 22 is a schematic cross-sectional view of a semiconductor packagein accordance with some exemplary embodiments of the disclosure.

FIG. 23 is a schematic cross-sectional view of a semiconductor packagein accordance with some exemplary embodiments of the disclosure.

FIG. 24 is a schematic cross-sectional view of a semiconductor packagein accordance with some exemplary embodiments of the disclosure.

FIG. 25 to FIG. 29 are schematic cross-sectional views of various stagesof manufacturing a semiconductor package in accordance with someexemplary embodiments of the disclosure.

FIG. 30 is a schematic cross-sectional view of a semiconductor packagein accordance with some exemplary embodiments of the disclosure.

FIG. 31 is a schematic cross-sectional view of a semiconductor packagein accordance with some exemplary embodiments of the disclosure.

FIG. 32 is a schematic enlarged cross-sectional view illustrating a partof the semiconductor package depicted in FIG. 31.

FIG. 33 is a schematic enlarged cross-sectional view illustrating a partof the semiconductor package in accordance with some exemplaryembodiments of the disclosure.

FIG. 34 is a schematic enlarged cross-sectional view illustrating a partof the semiconductor package in accordance with some exemplaryembodiments of the disclosure.

FIG. 35 is a schematic enlarged cross-sectional view illustrating a partof the semiconductor package in accordance with some exemplaryembodiments of the disclosure.

FIG. 36 is a schematic cross-sectional view of a semiconductor packagein accordance with some exemplary embodiments of the disclosure.

FIG. 37 is a flow chart illustrating a method of manufacturing asemiconductor package in accordance with some exemplary embodiments ofthe present disclosure.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components, values, operations, materials,arrangements, or the like, are described below to simplify thedisclosure. These are, of course, merely examples and are not intendedto be limiting. Other components, values, operations, materials,arrangements, or the like, are contemplated. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the disclosure may repeat reference numerals and/or letters inthe various examples. This repetition is for the purpose of simplicityand clarity and does not in itself dictate a relationship between thevarious embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

In addition, terms, such as “first,” “second,” “third,” and the like,may be used herein for ease of description to describe similar ordifferent element(s) or feature(s) as illustrated in the figures, andmay be used interchangeably depending on the order of the presence orthe contexts of the description.

Other features and processes may also be included. For example, testingstructures may be included to aid in the verification testing of the 3Dpackaging or 3DIC devices. The testing structures may include, forexample, test pads formed in a redistribution layer or on a substratethat allows the testing of the 3D packaging or 3DIC, the use of probesand/or probe cards, and the like. The verification testing may beperformed on intermediate structures as well as the final structure.Additionally, the structures and methods disclosed herein may be used inconjunction with testing methodologies that incorporate intermediateverification of known good dies to increase the yield and decreasecosts.

FIG. 1 to FIG. 14 are schematic cross-sectional views of various stagesof manufacturing a semiconductor package in accordance with someexemplary embodiments of the disclosure. FIG. 15 is a schematic enlargedcross-sectional view illustrating a part of the semiconductor packagedepicted in FIG. 14, where FIG. 15 illustrates an enlargedcross-sectional view of a portion of the semiconductor package depictedin FIG. 14 indicated by a dotted box A. In FIG. 1 to FIG. 14, asemiconductor package 10A is shown to represent a package structureobtained following the manufacturing method, for example. In someembodiments, two integrated circuit components are shown to representplural integrated circuit components (or semiconductordevices/dies/chips) of the wafer; and in addition, one or more packagesare shown to represent plural semiconductor packages obtained followingthe semiconductor manufacturing method, the disclosure is not limitedthereto.

Referring to FIG. 1, in some embodiments, a carrier 112 with a debondlayer 114 and a buffer layer 116 coated thereon is provided. In oneembodiment, the carrier 112 may be a glass carrier or any suitablecarrier for carrying a semiconductor wafer or a reconstituted wafer forthe manufacturing method of the semiconductor package.

In some embodiments, the debond layer 114 is disposed on the carrier112, and the material of the debond layer 114 may be any materialsuitable for bonding and debonding the carrier 112 from the abovelayer(s) (e.g., the buffer layer 116) or any wafer(s) disposed thereon.In some embodiments, the debond layer 114 may include a release layer(such as a light-to-heat conversion (“LTHC”) layer) and an adhesivelayer (such as an ultra-violet curable adhesive or a heat curableadhesive layer).

As shown in FIG. 1, in some embodiments, the buffer layer 116 isdisposed on the debond layer 114, and the debond layer 114 is locatedbetween the carrier 112 and the buffer layer 116. In some embodiments,the buffer layer 116 may be a dielectric material layer. In someembodiments, the buffer layer 116 may be a polymer layer which made ofpolyimide, polybenzoxazole (PBO), benzocyclobutene (BCB), or any othersuitable polymer-based dielectric material. In some embodiments, thebuffer layer 116 may be Ajinomoto Buildup Film (ABF), Solder Resist film(SR), or the like. The top surface of the buffer layer 116 may belevelled and may have a high degree of coplanarity.

The debond layer 114 and the buffer layer 116 may be formed by asuitable fabrication technique such as spin-coating, lamination,deposition, or the like.

Continued on FIG. 1, in some embodiments, at least one integratedcircuit component 130 is provided and disposed on the buffer layer 116(also see FIG. 37, step S100). In some embodiments, the integratedcircuits component 130 includes a semiconductor substrate 131, aninterconnection structure 132, a plurality of connecting pads 133, aplurality of connecting pillars 134, a protection layer 135, and one ormore through silicon vias (TSVs) 136. In some embodiments, thesemiconductor substrate 131 has a top surface S1, where theinterconnection structure 132 is disposed on and covers the top surfaceS1 of the semiconductor substrate 131. In some embodiments, theconnecting pads 133 are disposed on and electrically connected to theinterconnection structure 132, where the connecting pads 133 physicallycontacts the interconnection structure 132. In some embodiments, theconnecting pillars 134 are respectively disposed on and electricallyconnected to the connecting pads 133, where the connecting pillars 134physically contact the connecting pads 133. In some embodiments, theprotection layer 135 covers the interconnection structure 132, theconnecting pads 133, and the connecting pillars 134. That is to say, theprotection layer 135 prevents any possible damage(s) occurring on thesurfaces of the connecting pillar 134 during the transfer of theintegrated circuit component 130. In addition, in some embodiments, theprotection layer 135 may further act as a passivation layer forproviding better planarization and evenness. In some embodiments, theTSVs 136 are embedded in the semiconductor substrate 131 and connectedto the interconnection structure 132. In other words, the TSVs 136 areelectrically connected to the interconnection structure 132. The numbersof the connecting pads 133 and the connecting pillars 134 can beselected based on demand and are not limited in the disclosure.

In one embodiment, the semiconductor substrate 131 may be a siliconsubstrate including active components (e.g., diodes, transistors or thelike) and passive components (e.g., resistors, capacitors, inductors orthe like) formed therein.

In some embodiments, as shown in FIG. 1, the interconnection structure132 includes one or more inter-dielectric layers 132 a and one or morepatterned conductive layers 132 b stacked alternately. In certainembodiments, the patterned conductive layers 132 b are sandwichedbetween the inter-dielectric layers 132 a, where the top surface of thetopmost layer of the patterned conductive layers 132 b is exposed by thetopmost layer of the inter-dielectric layers 132 a and physicallyconnected to the connecting pads 133, and the lowest layer of thepatterned conductive layers 132 b is exposed by the lowest layer of theinter-dielectric layers 132 a and physically connected to a top surface136 a of each of the TSVs 136. As shown in FIG. 1, the lowest layer ofthe inter-dielectric layers 132 a is located on the top surface S1 ofthe semiconductor substrate 131, and the topmost layer of theinter-dielectric layers 132 a is at least partially in contact with theprotection layer 135. The numbers of the inter-dielectric layers 132 aand the patterned conductive layers 132 b can be selected based ondemand and are not limited in the disclosure.

In one embodiment, the inter-dielectric layers 132 a may be polyimide,polybenzoxazole (PBO), benzocyclobutene (BCB), a nitride such as siliconnitride, an oxide such as silicon oxide, phosphosilicate glass (PSG),borosilicate glass (BSG), boron-doped phosphosilicate glass (BPSG), acombination thereof or the like, which may be patterned using aphotolithography and/or etching process. In some embodiments, theinter-dielectric layers 132 a may be formed by suitable fabricationtechniques such as spin-on coating, chemical vapor deposition (CVD),plasma-enhanced chemical vapor deposition (PECVD) or the like.

In one embodiment, the patterned conductive layers 132 b may be made ofconductive materials formed by electroplating or deposition, such ascopper, copper alloy, aluminum, aluminum alloy, or combinations thereof,which may be patterned using a photolithography and etching process. Insome embodiments, the patterned conductive layers 132 b may be patternedcopper layers or other suitable patterned metal layers. Throughout thedescription, the term “copper” is intended to include substantially pureelemental copper, copper containing unavoidable impurities, and copperalloys containing minor amounts of elements such as tantalum, indium,tin, zinc, manganese, chromium, titanium, germanium, strontium,platinum, magnesium, aluminum or zirconium, etc.

In one embodiment, the connecting pads 133 may be made of aluminum oralloys thereof or the like, and may be formed by an electroplatingprocess. The disclosure is not limited thereto.

In one embodiment, the connecting pillars 134 may include copperpillars, copper alloy pillars or other suitable metal pillars, and maybe formed by an electroplating process or the like. In one embodiment, athickness T₁₃₄ of the connecting pillars 134 may approximately rangefrom 3 μm to 10 μm. In an alternative embodiment, the thickness T₁₃₄ ofthe connecting pillars 134 may approximately range from 10 μm to 30 μm.In an alternative embodiment, the thickness T₁₃₄ may approximately rangefrom 30 μm to 100 μm. The disclosure is not limited thereto.

In one embodiment, the protection layer 135 may be made of apolybenzoxazole (PBO) layer, a polyimide (PI) layer, or other suitablepolymers, which may be patterned using a photolithography and/or etchingprocess. In an alternative embodiment, the protection layer 135 may bemade of inorganic materials (such as silicon oxide, silicon nitride,silicon oxynitride or the like) or any suitable dielectric material.

In one embodiment, the TSVs 136 may include copper, nickel, titanium,tungsten, or alloys thereof or the like, and may be formed by aphotolithography and/or etching process and a deposition process. In oneembodiment, a maximum length L1 (see FIG. 15) of the top surface 136 aof the TSVs 136 may approximately range from 3 μm to 15 μm. In analternative embodiment, the maximum length L1 may approximately rangefrom 15 μm to 50 μm.

As shown in FIG. 1, a sidewall (not marked) of each of the TSVs 136 iscovered by a liner 137. As shown in FIG. 1, in some embodiments, each ofthe liner 137 is sandwiched between the semiconductor substrate 131 andthe sidewall of one of the TSVs 136. In one embodiment, the liners 137may be made of inorganic materials (such as silicon oxide, siliconnitride, silicon oxynitride or the like) or any suitable dielectricmaterial, which may be patterned using a photolithography and/or etchingprocess. In some embodiments, a thickness T (see FIG. 15) of the liners137 may approximately range from 0.5 μm to 2 μm.

In one embodiment, the materials of the patterned conductive layers 132b, the connecting pads 133, the connecting pillars 134, and the TSVs 136may be the same. In an alternative embodiment, the materials of thepatterned conductive layers 132 b, the connecting pads 133, theconnecting pillars 134, and the TSVs 136 may be different from eachother. In one embodiment, the materials of the inter-dielectric layers132 a, the protection layer 135, and the liners 137 may be the same. Inan alternative embodiment, the materials of the inter-dielectric layers132 a, the protection layer 135, and the liners 137 may be differentfrom each other. The disclosure is not limited thereto. Additionally, inan alternative embodiment, the integrated circuits component 130 may nothave the TSVs and liners.

In some embodiments, the integrated circuits component 130 ismanufactured through a front end of line (FEOL) process. However, thedisclosure is not limited thereto. It should be appreciated that theillustration of the integrated circuits component 130 and othercomponents throughout all figures is schematic and is not in scale.

Note that, as shown in FIG. 1, only one integrated circuit component 130is presented for illustrative purposes, however, it should be noted thatthe number of the integrated circuit component can be one or more thanone, the disclosure is not limited thereto. In certain embodiments,additional integrated circuit component(s) may be provided, and theadditional integrated circuit component(s) and the integrated circuitcomponent 130 may be the same type or different types. For example, theadditional integrated circuit component(s) may include digital chips,analog chips or mixed signal chips, such as application-specificintegrated circuit (“ASIC”) chips, sensor chips, wireless and radiofrequency (RF) chips, MEMS chips, CIS chips, pre-assembled packages,memory chips, logic chips or voltage regulator chips. The disclosure isnot limited thereto.

As shown in FIG. 1, in some embodiments, a connecting film 140 isprovided to a backside 130 b of the integrated circuit component 130 andthe buffer layer 116. Due to the connecting film 140, the integratedcircuit component 130 is stably adhered to the buffer layer 116. Incertain embodiments, the connecting film 140 may include a die attachfilm; however the disclosure is not limited thereto.

Continued on FIG. 1, in some embodiments, one or more conductive pillars120 are formed on the buffer layer 116. As shown in FIG. 1, theconductive pillars 120 are arranged aside of the integrated circuitcomponent 130. In some embodiments, the conductive pillars 120 arethrough integrated fan-out (info) vias. In certain embodiments, theconductive pillars 120 are arranged along but not on a cutting line (notshown) between two semiconductor package 10A. In one embodiment, thematerial of the conductive pillars 120 may include a metal material suchas copper or copper alloys, or the like. However, the disclosure is notlimited thereto. In one embodiment, the conductive pillars 120 may beformed prior to disposing the integrated circuit component 130 on thebuffer layer 116. In an alternative embodiment, the conductive pillars120 may be formed after disposing the integrated circuit component 130on the buffer layer 116, the disclosure is not limited thereto.

In some embodiments, the conductive pillars 120 are formed byphotolithography, plating, photoresist stripping processes or any othersuitable method. In one embodiment, the conductive pillars 120 may beformed by forming a mask pattern having openings (not shown), where themask pattern covers a portion of the buffer layer 116 and exposesanother portion of the buffer layer 116 with the openings; forming ametallic material to fill the openings so as to form the conductivepillars 120 by electroplating or deposition; and then removing the maskpattern. The material of the mask pattern may include a positivephoto-resist or a negative photo-resist. However, the disclosure is notlimited thereto.

In an alternative embodiment, the conductive pillars 120 may be formedby forming a seed layer (not shown) on the buffer layer 116; forming themask pattern with openings exposing portions of the seed layer; formingthe metallic material on the exposed portions of the seed layer to formthe conductive pillars 120 by plating; removing the mask pattern; andthen removing portions of the seed layer exposed by using the conductivepillars 120 as an etching mask. For example, the seed layer may be atitanium/copper composited layer. For simplification, only fourconductive pillars 120 are presented in FIG. 1 for illustrativepurposes. However, it should be noted that less or more than fourconductive pillars 120 may be formed; the disclosure is not limitedthereto. The number of the conductive pillars can be selected based onthe demand.

Referring to FIG. 2, in some embodiments, the insulating encapsulation160 is formed on the buffer layer 116 and over the carrier 112. In someembodiments, the conductive pillars 120, the integrated circuitcomponent 130 and the connecting film 140 are encapsulated in aninsulating encapsulation 160 (also see FIG. 37, step S200). As shown inFIG. 2, the insulating encapsulation 160 at least fills up the gapsbetween the conductive pillars 120 and between the conductive pillars120, the integrated circuit component 130 and the connecting film 140.In some embodiments, the insulating encapsulation 160 covers a topsurface (not marked) of the buffer layer 116, sidewalls 120S of theconductive pillars 120, a sidewall 130S of the integrated circuitcomponent 130 and a sidewall (not marked) of the connecting film 140.That is, the insulating encapsulation 160 wraps the sidewalls 120S ofthe conductive pillars 120, the sidewall 130S of the integrated circuitcomponent 130 and the sidewall of the connecting film 140.

As shown in FIG. 2, in some embodiments, the top surfaces 120 a of theconductive pillars 120 and a top surface 130 a of the integrated circuitcomponent 130 are exposed by a top surface 160 a of the insulatingencapsulation 160. The top surface 130 a is opposite to the backside 130b. In some embodiments, the top surfaces 120 a of the conductive pillars120 and the top surface 130 a of the integrated circuit component 130exposed by the top surface 160 a of the insulating encapsulation 160become substantially levelled with the top surface 160 a of theinsulating encapsulation 160. In other words, the top surface 160 a ofthe insulating encapsulation 160, the top surfaces 120 a of theconductive pillars 120 and the top surface 130 a of the integratedcircuit component 130 are coplanar with each other. In some embodiments,the material of the insulating encapsulation 160 may include polymermaterial (e.g., epoxy resin, and the like) either with or withouthardeners, fillers (e.g., silica filler, glass filler, aluminum oxide,silicon oxide, and the like), adhesion promoters, combinations thereof,and the like.

In some embodiments, the insulating encapsulation 160 is formed by anover-molding process followed by a planarizing process. For example, theformation of the insulating encapsulation 160 may include forming aninsulating encapsulation material (not shown) by over-molding toencapsulate the conductive pillars 120, the integrated circuit component130 and the connecting film 140, and then planarizing insulatingencapsulation material, the conductive pillars 120, and the integratedcircuit component 130 until the top surfaces of the connecting pillars134 and the protection layer 135 of the integrated circuit component 130and the top surfaces 120 a of the conductive pillars 120 being exposedby the planarized insulating encapsulation material to form theinsulating encapsulation 160. That is, after the planarizing process,the protection layer 135 of the integrated circuit component 130 ispartially removed to expose the connecting pillars 134 of the integratedcircuit component 130, and the insulating encapsulation material ispartially removed to expose the top surfaces of the conductive pillars120, the connecting pillars 134 and the protection layer 135. In otherwords, as shown in FIG. 2, the top surfaces of the conductive pillars120, the connecting pillars 134 and the protection layer 135 are exposedby the top surface 160 a of the insulating encapsulation 160. In certainembodiments, after the planarization, the top surface 160 a of theinsulating encapsulation 160, the top surfaces 120 a of the conductivepillars 120, and the top surface 130 a the integrated circuit component130 (e.g. the top surfaces of the connecting pillars 134 and theprotection layer 135) become substantially levelled with and coplanar toeach other.

In some embodiments, the planarizing step may include a grindingprocess, fly cutting process, or a chemical mechanical polishing (CMP)process. After the planarizing step, a cleaning step may be optionallyperformed, for example to clean and remove the residue generated fromthe planarizing step. However, the disclosure is not limited thereto,and the planarizing step may be performed through any other suitablemethod.

Referring to FIG. 3, in some embodiments, a dielectric layer 172 and ametallization layer 174 are sequentially formed on the carrier 112,where the metallization layer 174 is connected to the conductive pillars120 and the integrated circuit component 130. In some embodiments, themetallization layer 174 is electrically connected to the integratedcircuit component 130 through the connecting pillars 134 and theconnecting pads 133, and the interconnection structure 132. In someembodiments, the metallization layer 174 is electrically connected tothe conductive pillars 120 by direct contact. In other words, throughthe metallization layer 174, the integrated circuit component 130 iselectrically connected to at least a portion of the conductive pillars120.

In one embodiment, the dielectric layer 172 is formed by forming adielectric material layer (not shown) on the top surfaces 120 a of theconductive pillars 120, the top surface 130 a of the integrated circuitcomponent 130 and the top surface 160 a of the insulating encapsulation160, and patterning the dielectric material layer to form a plurality ofopenings (not marked) exposing the top surfaces 120 a of the conductivepillars 120 and portions of the top surface 130 a of the integratedcircuit component 130 (e.g., the top surfaces of the connecting pillars134). Then, the metallization layer 174 is formed by forming ametallization material layer (not shown) on the dielectric layer 172(where the metallization material layer filling into the openings formedin the dielectric layer 172 to physically contact the top surfaces 120 aof the conductive pillars 120 and the top surface of the connectingpillars 134 of the integrated circuit component 130), and thenpatterning the metallization material layer to form the metallizationlayer 174. Due to the configuration of the dielectric layer 172 and themetallization layer 174, a routing function is provided to thesemiconductor package 10A, such that the dielectric layer 172 and themetallization layer 174 is referred as a redistribution circuitstructure 170.

In some embodiments, the material of the dielectric layer 172 mayinclude polyimide, epoxy resin, acrylic resin, phenol resin, ABF-basedresin, benzocyclobutene (BCB), polybenzooxazole (PBO), or any othersuitable polymer-based dielectric material, and the dielectric layer 172may be formed by deposition. In some embodiments, the material of themetallization layer 174 may include aluminum, titanium, copper, nickel,tungsten, and/or alloys thereof, and the metallization layer 174 may beformed by electroplating or deposition.

In certain embodiments, the dielectric layer 172 and the metallizationlayer 174 together referred as a redistribution circuit structure 170.In some embodiments, the redistribution circuit structure 170 is afront-side redistribution layer electrically connected to the integratedcircuit component 130 and the conductive pillars 120. In certainembodiments, as the underlying insulating encapsulation 160 providesbetter planarization and evenness, the later-formed redistributioncircuit structure 170, especially the metallization layer with thin linewidth or tight spacing, can be formed with uniform line-widths or evenprofiles, resulting in improved line/wiring reliability.

In some embodiments, as shown in FIG. 3, the redistribution circuitstructure 170 includes one dielectric layer 172 and one metallizationlayer 174; however the disclosure is not limited thereto. The numbers ofthe dielectric layer 172 and the metallization layer 174 is not limitedin this disclosure.

In certain embodiments (not shown), the redistribution circuit structure170 may include a plurality of dielectric layers (e.g., a plurality ofthe dielectric layer 172) and a plurality of metallization layers (e.g.,a plurality of the metallization layer 174). The formation of theredistribution circuit structure 170 includes sequentially forming oneor more dielectric layers and one or more metallization layers inalternation. In certain embodiments, the metallization layers aresandwiched between the dielectric layers, where the top surface of thetopmost layer of the metallization layers is exposed by a topmost layerof the dielectric layers, and a bottom surface of the lowest layer ofthe metallization layers is exposed by the lowest layer of thedielectric layers. In one embodiment, the top surface of the topmostlayer of the metallization layers exposed by a topmost layer of thedielectric layer may be connected to an later-formed component(s), andthe bottom surface of the lowest layer of the metallization layersexposed by the lowest layer of the dielectric layers is connected to anunderlying component (e.g. the integrated circuit component 130).

In an alternative embodiment, a plurality of pads (not shown) may bedisposed on some of the top surface of the topmost layer of themetallization layers exposed by the topmost layer of the dielectriclayers for electrically connecting with the later-formed components. Insome embodiments, the above-mentioned pads include under-ball metallurgy(UBM) patterns for ball mount and/or connection pads for mounting ofpassive components. In one embodiment, the material of the pads mayinclude copper, nickel, titanium, tungsten, or alloys thereof or thelike, and may be formed by an electroplating process. The shape andnumber of the pads is not limited in this disclosure.

Referring to FIG. 4, in some embodiments, semiconductor devices 200 a,200 b are provided and then are disposed on the redistribution circuitstructure 170 (also see FIG. 37, step S300). In some embodiments,through the redistribution circuit structure 170, the semiconductordevice 200 a is electrically connected to the integrated circuitcomponent 130 and a group of the conductive pillars 120, while thesemiconductor device 200 b is electrically connected to the integratedcircuit component 130 and another group of the conductive pillars 120.As shown in FIG. 4, the semiconductor device 200 a and the semiconductordevice 200 b are mounted on the redistribution circuit structure 170 byforming a plurality of connectors 180 between the semiconductor devices200 a, 200 b and the redistribution circuit structure 170. In someembodiments, the connectors 180 are made of solder materials, such assolder joints. In some embodiments, the semiconductor device 200 a andthe semiconductor device 200 b are bonded to the redistribution circuitstructure 170 with the connectors 180 therebetween through flip chipbonding technology and/or surface mount technology. The disclosure isnot limited thereto.

In some embodiments, a height Ta of the semiconductor device 200 a issubstantially equal to a height Tb of the semiconductor device 200 b, asshown in FIG. 4. In an alternative embodiment, a height Ta of thesemiconductor device 200 a is different from a height Tb of thesemiconductor device 200 b; the disclosure is not limited thereto.

In some embodiments, as shown in FIG. 4, a gap G1 between thesemiconductor device 200 a and the semiconductor device 200 b mayapproximately range from 30 μm to 800 μm. In an alternative embodiment,the gap G1 may approximately range from 800 μm to 2 mm. In analternative embodiment, the gap G1 may be approximately above 2 mm.

In some embodiments, as shown in FIG. 4, a gap G2 between thesemiconductor device 200 a and the redistribution circuit structure 170and/or a gap G3 between the semiconductor device 200 b and theredistribution circuit structure 170 may approximately range from 20 μmto 50 μm. In an alternative embodiment, the gap G2 and/or the G3 mayapproximately range from 50 μm to 100 μm. In an alternative embodiment,the gap G2 and/or the G3 may approximately range from 100 μm to 300 μm.The gap G2 and gap G3 can be the same or different, the disclosure isnot limited thereto.

For example, the semiconductor device 200 a and the semiconductor device200 b may include digital chips, analog chips or mixed signal chips,such as application-specific integrated circuit (“ASIC”) chips, sensorchips, wireless and radio frequency (RF) chips, MEMS chips, CIS chips,pre-assembled packages, memory chips, logic chips or voltage regulatorchips. The disclosure is not limited thereto. In one embodiment, thesemiconductor device 200 a and the semiconductor device 200 b may be thesame type. In one embodiment, the semiconductor device 200 a and thesemiconductor device 200 b may be different types.

In the disclosure, semiconductor device 200 a and the semiconductordevice 200 b are electrically communicated to each other through theintegrated circuit component 130 in the semiconductor package 10A. Insome embodiments, the semiconductor device 200 a outputs an electricsignal to the semiconductor device 200 b through the integrated circuitcomponent 130, and the semiconductor device 200 b receives the electricsignal by-passed from the integrated circuit component 130 as an inputfor data processing or storing, where the semiconductor device 200 b mayfurther output an electric signal to the integrated circuit component130 for further purposes. In an alternative embodiment, thesemiconductor device 200 b outputs an electric signal to thesemiconductor device 200 a through the integrated circuit component 130,and the semiconductor device 200 a receives the electric signalby-passed from the integrated circuit component 130 as an input for dataprocessing or storing, where the semiconductor device 200 a may furtheroutput an electric signal to the integrated circuit component 130 forfurther purposes. In a further alternative embodiment, for one frameperiod, the semiconductor device 200 a outputs an electric signal to thesemiconductor device 200 b through the integrated circuit component 130,and the semiconductor device 200 b receives the electric signalby-passed from the integrated circuit component 130 as an input for dataprocessing or storing, where the semiconductor device 200 b may furtheroutput an electric signal to the integrated circuit component 130 forfurther purposes; and for another frame period, the semiconductor device200 b outputs an electric signal to the semiconductor device 200 athrough the integrated circuit component 130, and the semiconductordevice 200 a receives the electric signal by-passed from the integratedcircuit component 130 as an input for data processing or storing, wherethe semiconductor device 200 a may further output an electric signal tothe integrated circuit component 130 for further purposes. Thedisclosure is not specifically limited the ways of the electricalcommunication between the semiconductor device 200 a, the semiconductordevice 200 b, and the integrated circuit component 130.

In some embodiments, an electric signal as input to one of thesemiconductor device 200 a, the semiconductor device 200 b and theintegrated circuit component 130 may be provide by the conductivepillars 120 and/or the TSVs 136. Note that, in certain embodiments, theconductive pillars 120 and/or the TSVs 136 may be electrically connectedto later-formed components (e.g. conductive balls) that are electricallyconnected to additional semiconductor device(s) capable of providingelectric signals to be processed.

Referring to FIG. 5, in some embodiments, an underfill material 210 isformed between the semiconductor devices 200 a, 200 b and theredistribution circuit structure 170 and dispensed around the connectors180. In some embodiments, the underfill material 210 at least fills thegaps between the connectors 180 and between the redistribution circuitstructure 170, the connectors 180, the semiconductor device 200 a, andthe semiconductor device 200 b. As shown in FIG. 5, for example, theunderfill material 210 is disposed on the redistribution circuitstructure 170 and wraps sidewalls of the connectors 180 to providestructural support and protection to the connectors 180. In someembodiments, the underfill material 210 partially covers the sidewallsof the semiconductor device 200 a and the semiconductor device 200 b andexposes the top surfaces of the semiconductor device 200 a and thesemiconductor device 200 b, as shown in FIG. 5. In an alternativeembodiment (not shown), the underfill material 210 completely covers thesidewalls and top surfaces of the semiconductor device 200 a and thesemiconductor device 200 b. In an alternative embodiment (not shown),the underfill material 210 completely covers the sidewalls of thesemiconductor device 200 a and the semiconductor device 200 b andexposes the top surfaces of the semiconductor device 200 a and thesemiconductor device 200 b. The disclosure is not limited thereto.

In one embodiment, as shown in FIG. 5, a maximum width W of theunderfill material 210 (from the sidewalls of the semiconductor device200 a and the semiconductor device 200 b to the sidewall of theunderfill material 210) may approximately range from 30 μm to 200 μm. Inan alternative embodiment, the maximum width W may approximately rangefrom 200 μm to 600 μm. In an alternative embodiment, the maximum width Wmay be approximately above 600 μm.

In one embodiment, the underfill material 210 may be formed by underfilldispensing or any other suitable method. In some embodiments, theunderfill material 210 may be a molding compound including polymermaterial (e.g., epoxy resin, and the like) either with or withouthardeners, fillers (e.g., silica filler, glass filler, aluminum oxide,silicon oxide, and the like), adhesion promoters, combinations thereof,and the like. In one embodiment, the materials of the underfill material210 and the insulating encapsulation 160 may be the same. In analternative embodiment, the material of the underfill material 210 maybe different from the material of the insulating encapsulation 160. Thedisclosure is not limited thereto.

Referring to FIG. 6, in some embodiments, an insulating encapsulation220 is formed over the carrier 112 for encapsulating the semiconductordevice 200 a and the semiconductor device 200 b. In some embodiments,the insulating encapsulation 220 covers the sidewalls of thesemiconductor device 200 a, the semiconductor device 200 b and theunderfill material 210. In some embodiments, as shown in FIG. 6, theinsulating encapsulation 220 wraps the sidewalls of the semiconductordevice 200 a and the semiconductor device 200 b and exposes the topsurfaces of the semiconductor device 200 a and the semiconductor device200 b, however the disclosure is not limited thereto. In an alternativeembodiment, the insulating encapsulation 220 wraps the sidewalls and topsurfaces of the semiconductor device 200 a and the semiconductor device200 b. In one embodiment, the materials of the insulating encapsulation220 and the insulating encapsulation 160 may be the same. In analternative embodiment, the material of the insulating encapsulation 220may be different from the material of the insulating encapsulation 160.In one embodiment, the insulating encapsulation 220 may be formed by anover-molding process followed by a grinding process. A cleaning processmay be optionally performed after the grinding process, in addition. Thedisclosure is not limited thereto.

Referring to FIG. 7, in some embodiments, the semiconductor package 10Ais flipped (turned upside down) and placed on a carrier 312, and thecarrier 112 is debonded from the buffer layer 116. In some embodiments,the buffer layer 116 is easily separated from the carrier 112 due to thedebond layer 114, and the buffer layer 116 is exposed. In someembodiments, the carrier 112 is detached from the buffer layer 116through a debonding process, and the carrier 112 and the debond layer114 are removed.

In some embodiments, the materials of the carrier 312 and the carrier112 may be the same, however the disclosure is not limited thereto. Inan alternative embodiment, the material of the carrier 312 is differentfrom the material of the carrier 112.

Referring to FIG. 8, in some embodiments, a first planarizing process isperformed to expose the conductive pillars 120 and the TSVs 136 (alsosee FIG. 37, step S400). In some embodiments, the buffer layer 116, aportion of the insulating encapsulation 160, portions of the conductivepillars 120, and a portion of the semiconductor substrate 131 areremoved by the first planarizing process, such that a bottom surface S2of the semiconductor substrate 131, bottom surfaces 136 b of the TSVs136, bottom surfaces 120 b of the conductive pillars 120, and a bottomsurface 160 b of the insulating encapsulation 160 are substantiallylevelled with each other. In other words, the bottom surface S2 of thesemiconductor substrate 131, the bottom surfaces 136 b of the TSVs 136,the bottom surfaces 120 b of the conductive pillars 120, and the bottomsurface 160 b of the insulating encapsulation 160 are coplanar to eachother. As shown in FIG. 8, the bottom surfaces 136 b of the TSVs 136 areaccessibly revealed by the bottom surface S2 of the semiconductorsubstrate 131, and the bottom surfaces 120 b of the conductive pillars120 are accessibly revealed by the bottom surface 160 b of theinsulating encapsulation 160. In FIG. 8, the bottom surface S2 of thesemiconductor substrate 131 is also referred as the backside of theintegrated circuit component 130. In some embodiments, the firstplanarizing process may include a grinding process or the like; however,the disclosure is not limited thereto.

Referring to FIG. 9, in some embodiments, a patterning process isperformed to partially remove the semiconductor substrate 131 so as toform a recess R, such that the TSVs 136 partially protrude out of thesemiconductor substrate 131. In some embodiments, the semiconductorsubstrate 131 is partially removed to form a patterned bottom surfaceS2′, such that a portion of each of the TSVs 136 protrudes from thepatterned bottom surface S2′ of the semiconductor substrate 131. In FIG.9, the patterned bottom surface S2′ of the semiconductor substrate 131is referred as the backside of the integrated circuit component 130. Thepatterning process may include an etching process (such as a wet each ora dry etch) or the like, for example. The disclosure is not limitedthereto.

As shown in FIG. 9, in some embodiments, the portion of each of the TSVs136 protruding from the patterned bottom surface S2′ of thesemiconductor substrate 131 is in the recess R and has a height H1 (seeFIG. 15). In some embodiments, the height H1 of the portion of each ofthe TSVs 136 protruding from the patterned bottom surface S2′ of thesemiconductor substrate 131 may approximately range from 1 μm to 10 μm.In an alternative embodiment, the height H1 may approximately range from10 μm to 25 μm. In some embodiments, an angle θ (see FIG. 15) is betweenthe sidewalls (not marked) of the TSVs 136 and the patterned bottomsurface S2′ of the semiconductor substrate 131. In one embodiment, theangle θ is ranges about from 80° to 90°. That is, for each TSVs 136, anarea of the top surface 136 a is greater than or substantially equal toan area of the bottom surface 136 b in a vertical projection on to thetop surface S1 of the semiconductor substrate 131.

As shown in FIG. 9, the liners 137 cover the entire sidewalls of theTSVs 136; however the disclosure is not limited thereto. In oneembodiment, the liners 137 may be partially cover the sidewalls of theTSVs 136. In an alternative embodiment (not shown), the liners 137 coverthe sidewalls portions of the TSVs 136 being embedded in thesemiconductor substrate 131. That is, for example, the liners 137, whichare disposed on the sidewalls of the portions of the TSVs 136 protrudingfrom the patterned bottom surface S2′ of the semiconductor substrate131, are removed during the patterning process. The disclosure is notlimited thereto.

Referring to FIG. 10, in some embodiments, a passivation layer 118 isformed over the carrier 312. In some embodiments, the passivation layer118 is directly formed on the insulating encapsulation 160, theconductive pillars 120, the integrated circuit component 130, where thebottom surfaces 136 b of the TSVs 136, the patterned bottom surface S2′of the semiconductor substrate 131, the bottom surfaces 120 b of theconductive pillars 120, and the bottom surface 160 b of the insulatingencapsulation 160 are covered by and in physical contact with thepassivation layer 118. As shown in FIG. 10, a portion of the passivationlayer 118 fills into the recess R, where the recess R is fully filledwith the passivation layer 118. In some embodiments, a thickness of thepassivation layer 118 is greater than the height H1 of the portion ofeach of the TSVs 136 protruding from the patterned bottom surface S2′ ofthe semiconductor substrate 131.

In some embodiments, the passivation layer 118 may be a dielectricmaterial layer. In some embodiments, the passivation layer 118 may be apolymer layer which made of polyimide, polybenzoxazole (PBO),benzocyclobutene (BCB), or any other suitable polymer-based dielectricmaterial. In some embodiments, the passivation layer 118 may beAjinomoto Buildup Film (ABF), Solder Resist film (SR), or the like. Inone embodiment, the materials of the passivation layer 118 and thebuffer layer 116 are the same. In an alternative embodiment, thematerial of the passivation layer 118 is different from the material ofthe buffer layer 116. The disclosure is not limited thereto. In someembodiments, the passivation layer 118 may be formed by a suitablefabrication technique such as spin-coating, lamination, deposition, orthe like.

Referring to FIG. 11, in some embodiments, a second planarizing processis performed to form a planarized passivation layer 118′, where theplanarized passivation layer 118′ exposes the bottom surface 160 b ofthe insulating encapsulation 160, the bottom surfaces 120 b of theconductive pillars 120, and the bottom surface 136 b of the TSVs 136. Insome embodiments, during the second planarizing process, the passivationlayer 118 located in the recess R is remained in the semiconductorpackage 10A, while the rest of the passivation layer 118 are removed;and the remained passivation layer 118 is referred as the planarizedpassivation layer 118′. In some embodiments, the second planarizingprocess may include a grinding process or the like; and the disclosureis not limited thereto. In some embodiments, a height of the planarizedpassivation layer 118′ is substantially equal to the height H1 of theportion of each of the TSVs 136 protruding from the patterned bottomsurface S2′ of the semiconductor substrate 131. In other words, theportion of each of the TSVs 136 protruding from the patterned bottomsurface S2′ of the semiconductor substrate 131 is in the planarizedpassivation layer 118′ and has the height H1.

Referring to FIG. 12, in some embodiments, a passivation layer 119 isformed over the carrier 312. In some embodiments, the passivation layer119 is directly formed on the planarized passivation layer 118′, theconductive pillars 120, and the insulating encapsulation 160. In someembodiments, the passivation layer 119 may be a polymer layer which madeof polyimide, polybenzoxazole (PBO), benzocyclobutene (BCB), or anyother suitable polymer-based dielectric material. In some embodiments,the passivation layer 119 may be Ajinomoto Buildup Film (ABF), SolderResist film (SR), or the like. In some embodiments, the passivationlayer 119 may be formed by a suitable fabrication technique such asspin-coating, lamination, deposition, or the like. The top surface ofthe passivation layer 119 may be levelled and may have a high degree ofplanarization and evenness, which is beneficial for later-formedcomponents.

In one embodiment, the materials of the passivation layer 119 and theplanarized passivation layer 118′ are the same, such that thepassivation layer 119 and the planarized passivation layer 118′ areconsidered as a single layer with portions having different heights. Insuch embodiment, a portion including the passivation layer 119 and theplanarized passivation layer 118′ overlaying the patterned bottomsurface S2′ of the semiconductor substrate 131 has a maximum height H2(see FIG. 15). In some embodiments, the maximum height H2 mayapproximately range from 1 μm to 50 μm. In one embodiment, a height H3(e.g., H3=H2−H1, see FIG. 15) of the passivation layer 119 mayapproximately range from 1 μm to 10 μm. In an alternative embodiment,the height H3 may approximately range from 10 μm to 50 μm.

In an alternative embodiment, the material of the passivation layer 119is different from the material of the planarized passivation layer 118′.The disclosure is not limited thereto. In some embodiments, thepassivation layer 119 and/or the planarized passivation layer 118′prevent any possible damage(s) occurring on the conductive pillars 120and the TSVs 136.

Continued on FIG. 12, in some embodiments, a plurality of conductivepatterns 230 and a plurality of conductive elements 240 are disposed onthe passivation layer 119. As shown in FIG. 12, in some embodiments, theconductive patterns 230 are directly disposed on the bottom surfaces 120b of the conductive pillars 120 and the bottom surfaces 136 b of theTSVs 136 through contact openings 119 a formed in the passivation layer119. In some embodiments, a maximum length L2 (see FIG. 15) of thecontact openings 119 a may approximately range from 7 μm to 20 μm. In analternative embodiment, the maximum length L2 may approximately rangefrom 20 μm to 100 μm. In an alternative embodiment, the maximum lengthL2 may be approximately above 100 μm.

In some embodiments, some of the conductive elements 240 areelectrically connected to the integrated circuit component 130 throughsome of the conductive patterns 230 and the TSVs 136 (also see FIG. 37,step S500). In some embodiments, some of the conductive elements 240 areelectrically connected to the semiconductor device 200 a and thesemiconductor device 200 b through some of conductive patterns 230, theintegrated circuit component 130 (e.g. the TSVs 136), the redistributioncircuit structure 170, and the connectors 180. In some embodiments, someof the conductive elements 240 are electrically connected to thesemiconductor device 200 a and the semiconductor device 200 b throughsome of the conductive patterns 230, the conductive pillars 120, theredistribution circuit structure 170, and the connectors 180.

In some embodiments, the conductive patterns 230 may include under-ballmetallurgy (UBM) patterns or conductive pads. In some embodiments, thematerial of the conductive patterns 230 may include copper, nickel,titanium, tungsten, or alloys thereof or the like, and may be formed byan electroplating process.

In some embodiments, the conductive elements 240 may be disposed on theconductive patterns 230 by ball placement process or reflow process. Insome embodiments, the conductive elements 240 may be, solder balls orball grid array (BGA) balls, chip connectors (“C4”) or other connectorsfor connecting to an external device. In some embodiments, the materialof the conductive elements 240 may include lead-based materials (such asSn—Pb base materials) or lead-free material (such as Sn—Ag base orSn—Ag—Cu base materials) with or without additional impurity (such asNi, Bi, Sb, Au, etc). The disclosure is not limited thereto.

The numbers of the conductive patterns 230 and the conductive elements240 may correspond to the numbers of the conductive pillars 120 and theTSVs 136.

Referring to FIG. 13, in some embodiments, the carrier 312 is flipped(turned upside down) and then debonded from the semiconductor device 200a, the semiconductor device 200 b, and the insulating encapsulation 220.In some embodiments, the carrier 312 is detached from the semiconductordevice 200 a, the semiconductor device 200 b and the insulatingencapsulation 220 through a debonding process, where the carrier 312 isremoved, and the semiconductor device 200 a, the semiconductor device200 b and the insulating encapsulation 220 are exposed. During thedebonding step, a holding device 314 is adopted to secure thesemiconductor package 10A before debonding the carrier 312. As shown inFIG. 13, for example, the holding device 314 may be an adhesive tape, anadhesive carrier or a suction pad.

Referring to FIG. 14, in some embodiments, the conductive elements 240are released from the holding device 314 to form the semiconductorpackage 10A. In some embodiments, a dicing process is performed to cutthe wafer having a plurality of the semiconductor packages 10A intoindividual and separated semiconductor packages 10A. In one embodiment,the dicing process is a wafer dicing process including mechanical bladesawing or laser cutting. Up to here, the manufacture of thesemiconductor package 10A is completed.

FIG. 16 is a schematic cross-sectional view of a semiconductor packagein accordance with some exemplary embodiments of the disclosure.Referring to FIG. 14 and FIG. 16 together, the semiconductor package 10Adepicted in FIG. 14 and the semiconductor package 10B depicted in FIG.16 are similar; such that the elements similar to or substantially thesame as the elements described above will use the same referencenumbers, and certain details or descriptions of the same elements andthe relationship thereof (e.g. the relative positioning configurationand electrical connection) will not be repeated herein.

Referring to FIG. 14 and FIG. 16 together, the difference is that, forthe semiconductor package 10B depicted in FIG. 16, the height Ta of thesemiconductor device 200 a is different from the height Tb of thesemiconductor device 200 b. As shown in FIG. 16, the height Ta of thesemiconductor device 200 a is less than the height Tb of thesemiconductor device 200 b. However, the disclosure is not limitedthereto, in an alternative embodiment (not shown), the height Ta of thesemiconductor device 200 a may be greater than the height Tb of thesemiconductor device 200 b.

FIG. 17 is a schematic cross-sectional view of a semiconductor packagein accordance with some exemplary embodiments of the disclosure. FIG. 18is a schematic enlarged cross-sectional view illustrating a part of thesemiconductor package depicted in FIG. 17, where FIG. 18 illustrates anenlarged cross-sectional view of a portion of the semiconductor packagedepicted in FIG. 17 indicated by a dotted box B. FIG. 19 is a schematicenlarged cross-sectional view illustrating a part of the semiconductorpackage in accordance with some exemplary embodiments of the disclosure.FIG. 20 is a schematic enlarged cross-sectional view illustrating a partof the semiconductor package in accordance with some exemplaryembodiments of the disclosure. FIG. 21 is a schematic enlargedcross-sectional view illustrating a part of the semiconductor package inaccordance with some exemplary embodiments of the disclosure. In FIG. 18to FIG. 21, only certain structural features including the passivationlayer 119, the conductive pillars 120, the integrated circuit component130, the insulating encapsulation 160, the redistribution circuitstructure 170, and the conductive patterns 230 are stressed forillustration purposes, and only two conductive pillars 120 areillustrated for easy illustration.

Referring to FIG. 14 and FIG. 17 together, the semiconductor package 10Adepicted in FIG. 14 and the semiconductor package 10C depicted in FIG.17 are similar, the difference is that, for the semiconductor package10C depicted in FIG. 17, an additional element, e.g. an insulatingencapsulation 150, is further formed to warp at least a sidewall 130S ofthe integrated circuit component 130. The elements similar to orsubstantially the same as the elements described above will use the samereference numbers, and certain details or descriptions of the sameelements and the relationship thereof (e.g. the relative positioningconfiguration and electrical connection) will not be repeated herein.

Referring to FIG. 17, in some embodiments, prior to the formation of theinsulating encapsulation 160 described in FIG. 2, an insulatingencapsulation 150 is formed over the carrier 112, and then thepreviously described manufacturing process as described in FIG. 3 toFIG. 14 above can be performed to obtain the semiconductor package 10Cdepicted in FIG. 17.

In some embodiments, a top surface 150 a of the insulating encapsulation150 is substantially levelled with the top surface 160 a of theinsulating encapsulation 160 and the top surfaces 120 a of theconductive pillars 120, and a bottom surface 150 b of the insulatingencapsulation 150 is substantially levelled with the bottom surface 160b of the insulating encapsulation 160, the bottom surfaces 120 b of theconductive pillars 120, and the bottom surfaces 136 b of the TSVs 136.In other words, the top surface 150 a of the insulating encapsulation150 is coplanar to the top surface 160 a of the insulating encapsulation160 and the top surfaces 120 a of the conductive pillars 120, and thebottom surface 150 b of the insulating encapsulation 150 is coplanar tothe bottom surface 160 b of the insulating encapsulation 160, the bottomsurfaces 120 b of the conductive pillars 120, and the bottom surfaces136 b of the TSVs 136, as shown in FIG. 17.

In some embodiments, the insulating encapsulation 150 includes a glue ora glue material, and the insulating encapsulation 150 is formed by gluedispensing. In some embodiments, the insulating encapsulation 150includes an insulator material (such as epoxy-based polymer or thelike), an insulator material having fillers (such as silica, alumina, orthe like), or the like. Due to the insulating encapsulation 150, theadhesion degree of the integrated circuit component 130 and theunderlying layer (e.g. the buffer layer 116) is further enhanced. In thedisclosure, the material of the insulating encapsulation 150 isdifferent from the material of the insulating encapsulation 160. Thatis, the sidewall 150S of the insulating encapsulation 150 is referred asan interface of the insulating encapsulation 150 and the insulatingencapsulation 160, where the interface is clearly shown in FIG. 17.

In some embodiments, the insulating encapsulation 150 may differ fromthe insulating encapsulation 160 in modulus, CTE, and thermalconductivity.

In certain embodiments, there exists fillers in the insulatingencapsulation 160 for advanced packaging, where the modulus of theinsulating encapsulation 160 may approximately range from about 5 GPa toabout 30 GPa, the CTE of the insulating encapsulation 160 mayapproximately range from about 5 ppm/K to about 20 ppm/K (below a glasstransition temperature (Tg) of the insulating encapsulation 160), andthe thermal conductivity of the insulating encapsulation 160 mayapproximately range from about 1 W/mK to about 20 W/mK. In analternative embodiment of having fillers in the insulating encapsulation160, the modulus of the insulating encapsulation 160 may beapproximately greater than 30 GPa, the CTE of the insulatingencapsulation 160 may be approximately greater than 20 ppm/K (below theTg of the insulating encapsulation 160), and the thermal conductivity ofthe insulating encapsulation 160 may be approximately greater than 20W/mK.

On the other hand, the insulating encapsulation 150, for example, doesnot necessarily bear these criteria in the advanced packaging; and thatis, there may not be fillers in the insulating encapsulation 150, wherethe modulus of the insulating encapsulation 150 may approximately rangefrom about 1 GPa to about 10 GPa, the CTE of the insulatingencapsulation 150 may approximately range from about 20 ppm/K to about60 ppm/K (below a Tg of the insulating encapsulation 150), and thethermal conductivity of the insulating encapsulation 150 mayapproximately range from about 0.1 W/mK to about 5 W/mK. In analternative embodiment of having no filler in the insulatingencapsulation 150, the modulus of the insulating encapsulation 150 mayapproximately range from about 1 GPa to about 10 GPa, the CTE of theinsulating encapsulation 150 may be approximately greater than 60 ppm/K(below the Tg of the insulating encapsulation 150), and the thermalconductivity of the insulating encapsulation 150 may approximately rangefrom about 0.1 W/mK to about 5 W/mK.

In an example, as shown in FIG. 17 and FIG. 18, some of the conductivepillars 120 and the integrated circuit component 130 are encapsulated inthe insulating encapsulation 150, and some of the conductive pillars 120are encapsulated in the insulating encapsulation 160, for instance.

Referring to FIG. 18, the conductive pillars 120 includes at least onefirst conductive pillar 120A and at least one second conductive pillar120B. In some embodiments, the first conductive pillar 120A isencapsulated in the insulating encapsulation 150, where a sidewall 120ASof the first conductive pillar 120A is covered by the insulatingencapsulation 150, such that the first conductive pillar 120A isseparated from the insulating encapsulation 160 by the insulatingencapsulation 150. In other words, the first conductive pillar 120A issurrounded by and in contact with the insulating encapsulation 150 andis free of the insulating encapsulation 160. In some embodiments, thesecond conductive pillar 120B is encapsulated in the insulatingencapsulation 160, where a sidewall 120BS of the second conductivepillar 120B is covered by the insulating encapsulation 160, such thatthe second conductive pillar 120B is separated from the insulatingencapsulation 150 by the insulating encapsulation 160. In other words,the second conductive pillar 120B is surrounded by and in contact withthe insulating encapsulation 160 and is free of the insulatingencapsulation 150. As shown in FIG. 18, the first conductive pillar 120Apenetrates the insulating encapsulation 150, and the second conductivepillar 120B penetrates the insulating encapsulation 160.

In certain embodiments, as shown in FIG. 18, the sidewall 150S and thebottom surface 150 b of the insulating encapsulation 150 constitute anangle θ1, where the angle θ1 is an acute angle. In one embodiment, arange of the angle θ1 is about from 0.5° to 30°, however the disclosureis not limited thereto. In an alternative embodiment, the range of theangle θ1 is about from 30° to 60°. In an alternative embodiment, therange of the angle θ1 is about from 60° to 85°. The disclosure is notlimited thereto.

In some embodiments, a maximum lateral width W1 from the sidewall 150Sof the insulating encapsulation 150 to the sidewall 130S of theintegrated circuit component 130 may range approximately from 10 μm to100 μm, however the disclosure is not limited thereto. In an alternativeembodiment, the maximum lateral width W1 may range approximately from100 μm to 500 μm. In an alternative embodiment, the maximum lateralwidth W1 may be approximately above 500 μm.

In some embodiments, a maximum lateral distance d from the sidewall 150Sof the insulating encapsulation 150 to the sidewall 120BS of the secondconductive pillar 120B (e.g. the conductive pillar(s) 120 not covered bythe insulating encapsulation 150) may range approximately from 5 μm to100 μm, however the disclosure is not limited thereto. In an alternativeembodiment, the maximum lateral distance d may range approximately from100 μm to 500 μm. In an alternative embodiment, the maximum lateraldistance d may be approximately above 500 μm.

Additionally, some various modifications of the configurationrelationship of the conductive pillars 120, the insulating encapsulation150, and the insulating encapsulation 160 are shown in FIG. 19 to FIG.21. However, the disclosure is not limited thereto.

Referring to FIG. 19, the conductive pillars 120 includes at least twofirst conductive pillars 120A. In some embodiments, the first conductivepillars 120A are encapsulated in the insulating encapsulation 150, wherethe sidewalls 120AS of the first conductive pillars 120A are covered bythe insulating encapsulation 150, such that the first conductive pillars120A are separated from the insulating encapsulation 160 by theinsulating encapsulation 150. In other words, the first conductivepillars 120A are surrounded by and in contact with the insulatingencapsulation 150 and are free of the insulating encapsulation 160. Asshown in FIG. 19, the first conductive pillars 120A penetrate theinsulating encapsulation 150.

Referring to FIG. 20, the conductive pillars 120 includes at least twosecond conductive pillars 120B. In some embodiments, the secondconductive pillars 120B are encapsulated in the insulating encapsulation160, where the sidewalls 120BS of the second conductive pillars 120B arecovered by the insulating encapsulation 160, such that the secondconductive pillars 120B are separated from the insulating encapsulation150 by the insulating encapsulation 160. In other words, the secondconductive pillars 120B are surrounded by and in contact with theinsulating encapsulation 160 and are free of the insulatingencapsulation 150. As shown in FIG. 20, the second conductive pillars120B penetrate the insulating encapsulation 160.

In the disclosure, the angle θ1, the maximum lateral width W1, and/orthe maximum lateral distance d described in FIG. 18 also applied to theangle θ1, the maximum lateral width W1, and/or the maximum lateraldistance d depicted in FIG. 19 and FIG. 20; and thus will not berepeated herein.

Referring to FIG. 21, the conductive pillars 120 includes at least onefirst conductive pillar 120A and at least one third conductive pillar120C. In some embodiments, the first conductive pillar 120A isencapsulated in the insulating encapsulation 150, where the sidewall120AS of the first conductive pillar 120A is covered by the insulatingencapsulation 150, such that the first conductive pillar 120A isseparated from the insulating encapsulation 160 by the insulatingencapsulation 150. In other words, the first conductive pillar 120A issurrounded by and in contact with the insulating encapsulation 150 andis free of the insulating encapsulation 160. As shown in FIG. 21, thefirst conductive pillar 120A penetrates the insulating encapsulation150. In some embodiments, the third conductive pillar 120C isencapsulated in the insulating encapsulating 150 and the insulatingencapsulation 160, where the sidewall 120CS of the third conductivepillar 120C is partially covered by the insulating encapsulation 150 andis partially covered by the insulating encapsulation 160. In otherwords, the third conductive pillar 120C is surrounded by and in contactwith the insulating encapsulation 150 and the insulating encapsulation160, simultaneously. As shown in FIG. 20, the third conductive pillar120C penetrates the interface (e.g., the sidewall 150S of the insulatingencapsulation 150) of the insulating encapsulation 150 and theinsulating encapsulation 160.

In some embodiments, an angle θ2 is between the interface (e.g., thesidewall 150S) of the insulating encapsulation 150 and the insulatingencapsulation 160 and the sidewall 120CS of the third conductive pillar120C, where the angle θ2 is an acute angle. In one embodiment, a rangeof the angle θ2 is about from 1° to 30°. In an alternative embodiment,the range of the angle θ2 is about from 30° to 60°. In an alternativeembodiment, the range of the angle θ2 is about from 60° to 89°.

In some embodiments, an angle θ3 is between the interface (e.g., thesidewall 150S) of the insulating encapsulation 150 and the insulatingencapsulation 160 and the top surface 160 a of the insulatingencapsulation 160, where the angle θ3 is an acute angle, (e.g.θ3=90°−θ2).

In some embodiments, a maximum lateral width W2 measured from thesidewall 150S of the insulating encapsulation 150 to the sidewall 120CSof the third conductive pillar 120C (e.g. the conductive pillar(s) 120penetrating the interface of two different insulating encapsulations)may approximately range from 10 μm to 100 μm, however the disclosure isnot limited thereto. In an alternative embodiment, the maximum lateralwidth W2 may approximately range from 100 μm to 500 μm. In analternative embodiment, the maximum lateral width W2 may beapproximately above 500 μm.

In an alternative embodiment (not shown), the conductive pillars 120 mayinclude at least one second conductive pillar 120B and at least onethird conductive pillar 120C, and the second conductive pillar 120Bpenetrates the insulating encapsulation 160 while the third conductivepillar 120C penetrates the interface of the insulating encapsulation 150and the insulating encapsulation 160. In an alternative embodiment (notshown), the conductive pillars 120 may include at least one firstconductive pillar 120A, at least one second conductive pillar 120B andat least one third conductive pillar 120C, and the first conductivepillar 120A and the second conductive pillar 120B respectively penetratethe insulating encapsulation 150 and the insulating encapsulation 160while the third conductive pillar 120C penetrates the interface of theinsulating encapsulation 150 and the insulating encapsulation 160. Theabove embodiments may have the similar specifications of the anglesθ1˜θ3, the maximum lateral widths W1˜W2, and/or the maximum lateraldistance d described in FIG. 18 to FIG. 21. The disclosure is notlimited thereto.

FIG. 22 is a schematic cross-sectional view of a semiconductor packagein accordance with some exemplary embodiments of the disclosure.Referring to FIG. 17 and FIG. 22 together, the semiconductor package 10Cdepicted in FIG. 17 and the semiconductor package 10D depicted in FIG.22 are similar; such that the elements similar to or substantially thesame as the elements described above will use the same referencenumbers, and certain details or descriptions of the same elements andthe relationship thereof (e.g. the relative positioning configurationand electrical connection) will not be repeated herein.

Referring to FIG. 17 and FIG. 22 together, the difference is that, forthe semiconductor package 10D depicted in FIG. 22, the height Ta of thesemiconductor device 200 a is different from the height Tb of thesemiconductor device 200 b. As shown in FIG. 22, the height Ta of thesemiconductor device 200 a is less than the height Tb of thesemiconductor device 200 b. However the disclosure is not limitedthereto, in an alternative embodiment (not shown), the height Ta of thesemiconductor device 200 a may be greater than the height Tb of thesemiconductor device 200 b.

During the packaging processes, the semiconductor packages 10A-10Drespectively depicted in FIG. 14, FIG. 16, FIG. 17, and FIG. 22 mayfurther include additional one or more semiconductor device(s) andadditional one or more integrated circuit component(s). An exemplaryembodiment is provided in FIG. 23, where the semiconductor package 20depicted in FIG. 23 is a modification of the semiconductor package 10Cdepicted in FIG. 17, the disclosure is not limited thereto. Suchmodification may be also applied to the semiconductor packages 10A, 10B,and 10D respectively depicted in FIG. 14, FIG. 16, and FIG. 22.

FIG. 23 is a schematic cross-sectional view of a semiconductor packagein accordance with some exemplary embodiments of the disclosure.Referring to FIG. 17 and FIG. 23 together, the semiconductor package 10Cdepicted in FIG. 17 and the semiconductor package 20 depicted in FIG. 23are similar, additional elements, e.g. a semiconductor device 200 c anda semiconductor device 200 d, are further included in the semiconductorpackage 20, and the redistribution circuit structure 170 is replacedwith the redistribution circuit structure 170′. The elements similar toor substantially the same as the elements described above will use thesame reference numbers, and certain details or descriptions of the sameelements and the relationship thereof (e.g. the relative positioningconfiguration and electrical connection) will not be repeated herein.

The formation of the redistribution circuit structure 170′ includessequentially forming one or more dielectric layers 172 and one or moremetallization layers 174 in alternation. The material of theredistribution circuit structure 170′ and formation method thereof aresimilar to the processes for forming the redistribution circuitstructure 170 as described in FIG. 3 and the associated description, andthus may not be repeated herein. In certain embodiments, the top surfaceof the topmost layer of the metallization layers 174 is exposed toelectrically connect to the semiconductor devices 200 a˜200 c throughthe connectors 180, and the bottom surface of the lowest layer of themetallization layers 174 is exposed to directly connect to theintegrated circuit component 130, the semiconductor device 200 d, andthe conductive pillars 120.

In some embodiments, as shown in FIG. 23, the semiconductor device 200 dis arranged aside of the integrated circuit component 130 andencapsulated in the insulating encapsulation 150. In some embodiments, aconnecting film 142 is located between the semiconductor device 200 dand the passivation layer 119, and a sidewall 200dS of the semiconductordevice 200 d is in contact with the insulating encapsulation 150. Incertain embodiments, the semiconductor device 200 d is electricallyconnected to the redistribution circuit structure 170′. In someembodiments, through the redistribution circuit structure 170′, thesemiconductor device 200 d is electrically connected to some of theconductive pillars 120. In some embodiments, through the redistributioncircuit structure 170′ and some of the conductive pillars 120, thesemiconductor device 200 d is electrically connected to some of theconductive elements 240. In some embodiments, through the redistributioncircuit structure 170′, the semiconductor device 200 d is electricallyconnected to the integrated circuit component 130. In some embodiments,the materials of the connecting film 142 and the connecting film 140 maybe the same or different, the disclosure is not limited thereto.

In some embodiments, the semiconductor device 200 a is electricallyconnected to the integrated circuit component 130 through the connectors180 and the redistribution circuit structure 170′. In some embodiments,the semiconductor device 200 a is electrically connected to some of theconductive elements 240 through the connectors 180, the redistributioncircuit structure 170′, the integrated circuit component 130 (e.g., theTSVs 136), and the conductive patterns 230. In some embodiments, thesemiconductor device 200 a is electrically connected to some of theconductive elements 240 through the connectors 180, the redistributioncircuit structure 170′, some of the conductive pillars 120, and theconductive patterns 230.

In some embodiments, the semiconductor device 200 b is electricallyconnected to the integrated circuit component 130 through the connectors180 and the redistribution circuit structure 170′. In some embodiments,the semiconductor device 200 b is electrically connected to some of theconductive elements 240 through the connectors 180, the redistributioncircuit structure 170′, the integrated circuit component 130 (e.g., theTSVs 136), and the conductive patterns 230. In some embodiments, thesemiconductor device 200 b is electrically connected to some of theconductive elements 240 through the connectors 180, the redistributioncircuit structure 170′, some of the conductive pillars 120, and theconductive patterns 230.

In some embodiments, as shown in FIG. 23, the semiconductor device 200 cis arranged aside of the semiconductor device 200 a and thesemiconductor device 200 b, and the semiconductor device 200 c iselectrically connected to the redistribution circuit structure 170′through the connectors 180. In certain embodiments, the semiconductordevice 200 c is encapsulated in the underfill material 210. In certainembodiments, the semiconductor device 200 c is encapsulated in theinsulating encapsulation 220. In some embodiments, the semiconductordevice 200 c is electrically connected to the integrated circuitcomponent 130 through the connectors 180 and the redistribution circuitstructure 170′. In some embodiments, the semiconductor device 200 c iselectrically connected to some of the conductive elements 240 throughthe connectors 180, the redistribution circuit structure 170′, theintegrated circuit component 130 (e.g., the TSVs 136), and theconductive patterns 230. In some embodiments, the semiconductor device200 c is electrically connected to some of the conductive elements 240through the connectors 180, the redistribution circuit structure 170′,some of the conductive pillars 120, and the conductive patterns 230.

As shown in FIG. 23, in some embodiments, the semiconductor device 200a, the semiconductor device 200 b, the semiconductor device 200 c and/orthe semiconductor device 200 d are electrically communicated to eachother through the integrated circuit component 130 in the semiconductorpackage 20. For example, the semiconductor device 200 c and thesemiconductor device 200 d may include digital chips, analog chips ormixed signal chips, such as application-specific integrated circuit(“ASIC”) chips, sensor chips, wireless and radio frequency (RF) chips,MEMS chips, CIS chips, pre-assembled packages, memory chips, logic chipsor voltage regulator chips. In certain embodiments, the semiconductordevice 200 a, the semiconductor device 200 b, the semiconductor device200 c and/or the semiconductor device 200 d may be the same type ordifferent types. The disclosure is not limited thereto.

During the packaging processes, the semiconductor packages 10A-10Drespectively depicted in FIG. 14, FIG. 16, FIG. 17, and FIG. 22 mayfurther include additional one or more semiconductor device(s) andadditional one or more integrated circuit component(s) encapsulated indifferent layers of insulating encapsulations. An exemplary embodimentis provided in FIG. 24, where the semiconductor package 30 depicted inFIG. 24 is a modification of the semiconductor package 10C depicted inFIG. 17. In some embodiments, as shown in FIG. 24, there are threelayers of insulating encapsulations, however the disclosure is notlimited thereto; the number of the layers of the insulatingencapsulations may be less than three or more than three. Suchmodification may be also applied to the semiconductor packages 10A, 10B,and 10D respectively depicted in FIG. 14, FIG. 16, and FIG. 22.

FIG. 24 is a schematic cross-sectional view of a semiconductor packagein accordance with some exemplary embodiments of the disclosure.Referring to FIG. 17 and FIG. 24 together, the semiconductor package 10Cdepicted in FIG. 17 and the semiconductor package 30 depicted in FIG. 24are similar, additional elements, e.g. a semiconductor devices 200 e-200g, an additional integrated circuit components 130′, and redistributioncircuit structures 270, 370, are further included in the semiconductorpackage 30. The elements similar to or substantially the same as theelements described above will use the same reference numbers, andcertain details or descriptions of the same elements and therelationship thereof (e.g. the relative positioning configuration andelectrical connection) will not be repeated herein.

As shown in FIG. 24, the semiconductor package 30 at least includes thepassivation layer 119, the conductive pillars 120, the integratedcircuit components 130 and 130′, the insulating encapsulation 150including first portion 150A and a second portion 150B, the insulatingencapsulation 160 including a first portion 160A and a second portion160B, the redistribution circuit structures 170, 270, 370, theconnectors 180 including first connectors 180 a, second connectors 180 band third connectors 180 c, the semiconductor devices 200 a, 200 b, 200e, 200 f, 200 g, the underfill material 210, the insulatingencapsulation 220, the conductive patterns 230, and the conductiveelements 240. Note that, the integrated circuit component 130′ is thesame as the integrated circuit component 130, and thus certain detailsor descriptions of the same elements and the relationship thereof (e.g.the relative positioning configuration and electrical connection) willnot be repeated herein. However the disclosure is not limited thereto;in an alternative element, the integrated circuit component 130′ may bedifferent from the integrated circuit component 130.

In some embodiments, as shown in FIG. 24, the integrated circuitcomponent 130 and the semiconductor device 200 g are disposed on thepassivation layer 119 and encapsulated in the first portion 150A of theinsulating encapsulation 150, where the integrated circuit component 130and the semiconductor device 200 g are arranged aside to each other. Insome embodiments, the first portion 150A of the insulating encapsulation150 is encapsulated in the first portion 160A of the insulatingencapsulation 160.

In some embodiments, the conductive pillars 120 are arranged aside ofthe integrated circuit component 130 and the semiconductor device 200 gand are disposed on the passivation layer 119. As shown in FIG. 24, someof the conductive pillars 120 are encapsulated in the first portion 150Aof the insulating encapsulation 150, and some of the conductive pillars120 are encapsulated in the first portion 160A of the insulatingencapsulation 160.

In some embodiments, the redistribution circuit structure 270 is betweenthe passivation layer 119 and the integrated circuit component 130 andbetween the passivation layer 119 and the semiconductor device 200 g. Insome embodiments, the redistribution circuit structure 270 is betweenthe passivation layer 119 and the first portion 150A of the insulatingencapsulation 150 and between the passivation layer 119 and the firstportion 160A of the insulating encapsulation 160. In some embodiments,the redistribution circuit structure 270 includes dielectric layers 272and metallization layers 274 arranged in alternation, where a topsurface of the topmost layer of the metallization layers 274 exposed bythe topmost layer of the dielectric layers 272 is physically connectedto the first connectors 180 a and the conductive pillars 120, and abottom surface of the lowest layer of the metallization layers 274exposed by the lowest layer of the dielectric layers 272 is physicallyconnected to the conductive patterns 230 connecting to the conductiveelements 240. As shown in FIG. 24, the integrated circuit component 130and the semiconductor device 200 g are electrically connected to theredistribution circuit structure 270 through the first connectors 180 aof the connectors 180. The material of the redistribution circuitstructure 270 and formation method thereof are similar to the processesfor forming the redistribution circuit structure 170′ as described inFIG. 23, and thus may not be repeated herein.

In some embodiments, as shown in FIG. 24, the redistribution circuitstructure 170′ is disposed on the integrated circuit component 130, thesemiconductor device 200 g, the first portion 150A of the insulatingencapsulation 150, and the first portion 160A of the insulatingencapsulation 160. In some embodiments, the integrated circuit component130 and the semiconductor device 200 g are electrically connected to theredistribution circuit structure 170′. In certain embodiments, theredistribution circuit structure 170′ includes the dielectric layers 172and the metallization layers 174, where the top surface of the topmostlayer of the metallization layers 174 is exposed to electrically connectto the semiconductor devices 200 e, 200 f and the integrated circuitcomponents 130′ through the second connectors 180 b, and the bottomsurface of the lowest layer of the metallization layers 174 is exposedto electrically connect to the integrated circuit component 130, thesemiconductor device 200 g, and the conductive pillars 120. The materialof the redistribution circuit structure 170′ and formation methodthereof are similar to the processes for forming the redistributioncircuit structure 170′ as described in FIG. 23, and thus may not berepeated herein.

As shown in FIG. 24, in some embodiments, some of the conductiveelements 240 are electrically connected to the integrated circuitcomponent 130 through the conductive patterns 230, the redistributioncircuit structure 270 and the first connectors 180 a. In someembodiments, some of the conductive elements 240 are electricallyconnected to the integrated circuit component 130 through the conductivepatterns 230, the redistribution circuit structure 270, some of theconductive pillars 120, the redistribution circuit structure 170′, andthe connecting pillars (not marked). In some embodiments, some of theconductive elements 240 are electrically connected to the semiconductordevice 200 g through the conductive patterns 230, the redistributioncircuit structure 270 and the first connectors 180 a.

As shown in FIG. 24, the integrated circuit component 130, thesemiconductor device 200 g, and the conductive pillars 120, the firstportion 150A of the insulating encapsulation 150, and the first portion160A of the insulating encapsulation 160 are located between theredistribution circuit structure 270 and the redistribution circuitstructure 170′.

In some embodiments, as shown in FIG. 24, the integrated circuitcomponent 130′, the semiconductor device 200 e, and the semiconductordevice 200 f are disposed on the redistribution circuit structure 170′and encapsulated in the second portion 150B of the insulatingencapsulation 150, where the integrated circuit component 130′, thesemiconductor device 200 e, and the semiconductor device 200 f arearranged aside to each other and over the integrated circuit component130 and the semiconductor device 200 g. In some embodiments, the secondportion 150B of the insulating encapsulation 150 is encapsulated in thesecond portion 160B of the insulating encapsulation 160.

In some embodiments, as shown in FIG. 24, the integrated circuitcomponent 130′, the semiconductor device 200 e, and the semiconductordevice 200 f are electrically connected to the redistribution circuitstructure 170′ through the second connectors 180 b. In certainembodiments, the integrated circuit component 130′, the semiconductordevice 200 e, and the semiconductor device 200 f may be electricallyconnected to the integrated circuit component 130 through the secondconnectors 180 b, the redistribution circuit structure 170′, theconductive pillars 120, the redistribution circuit structure 270, andthe first connectors 180 a. In certain embodiments, the integratedcircuit component 130′, the semiconductor device 200 e, and thesemiconductor device 200 f may be electrically connected to theintegrated circuit component 130 through the second connectors 180 b andthe redistribution circuit structure 170′. In certain embodiments, theintegrated circuit component 130′, the semiconductor device 200 e, andthe semiconductor device 200 f may be electrically connected to some ofthe conductive elements 240 through the second connectors 180 b, theredistribution circuit structure 170′, some of the conductive pillars120, the redistribution circuit structure 270, and the conductivepatterns 230. In certain embodiments, the integrated circuit component130′, the semiconductor device 200 e, and the semiconductor device 200 fmay be electrically connected to some of the conductive elements 240through the second connectors 180 b, the redistribution circuitstructure 170′, the integrated circuit component 130 (e.g. the TSVs136), the first connectors 180 a, the redistribution circuit structure270, and the conductive patterns 230.

In other words, the integrated circuit component 130′, the semiconductordevice 200 e, the semiconductor device 200 f, and the semiconductordevice 200 g are electrically communicated to each other through theintegrated circuit component 130.

In some embodiments, as shown in FIG. 24, the redistribution circuitstructure 370 is disposed on the integrated circuit component 130′, thesemiconductor device 200 e, the semiconductor device 200 f, the secondportion 150B of the insulating encapsulation 150, and the second portion160B of the insulating encapsulation 160. In certain embodiments, theredistribution circuit structure 370 includes one dielectric layer 372and one metallization layer 374, where the top surface of themetallization layer 374 is exposed to electrically connect to thesemiconductor device 200 a and the semiconductor device 200 b throughthe third connectors 180 c, and the bottom surface of the metallizationlayer 374 is exposed to electrically connect to the integrated circuitcomponent 130′. The material of the redistribution circuit structure 370and formation method thereof are similar to the processes for formingthe redistribution circuit structure 170 as described in FIG. 3, andthus may not be repeated herein.

As shown in FIG. 24, the integrated circuit component 130′, thesemiconductor device 200 e, and the semiconductor device 200 f arelocated between the redistribution circuit structure 170′ and theredistribution circuit structure 370.

In some embodiments, as shown in FIG. 24, the semiconductor device 200 aand the semiconductor device 200 b are disposed on and electricallyconnected to the redistribution circuit structure 370 through the thirdconnectors 180 c. In certain embodiments, the semiconductor device 200 aand the semiconductor device 200 b are encapsulated in the underfillmaterial 210 and the insulating encapsulation 220. As shown in FIG. 24,the underfill material 210 is encapsulated in the insulatingencapsulation 220. In some embodiments, the semiconductor device 200 aand the semiconductor device 200 b are electrically connected to theintegrated circuit component 130′ through the redistribution circuitstructure 370 and the third connectors 180 c. In other words, thesemiconductor device 200 a and the semiconductor device 200 b areelectrically communicated to each other through the integrated circuitcomponent 130′.

In some embodiments, the electric signal (acted as input data or outputdata) may be transmitted from the semiconductor devices 200 a, 200 b,200 e, 200 f, 200 g and/or the integrated circuit components 130, 130′to the external elements connected to the conductive elements 240, ormay be transmitted from the external elements connected to theconductive elements 240 to the semiconductor devices 200 a, 200 b, 200e, 200 f, 200 g and/or the integrated circuit components 130, 130′. Thedisclosure is not limited thereto.

For example, the semiconductor devices 200 e, 200 f, 200 g may includedigital chips, analog chips or mixed signal chips, such asapplication-specific integrated circuit (“ASIC”) chips, sensor chips,wireless and radio frequency (RF) chips, MEMS chips, CIS chips,pre-assembled packages, memory chips, logic chips or voltage regulatorchips. In certain embodiments, the semiconductor devices 200 a, 200 b,200 e, 200 f, 200 g may be the same type or different types. Thedisclosure is not limited thereto.

FIG. 25 to FIG. 29 are schematic cross-sectional views of various stagesof manufacturing a semiconductor package in accordance with someexemplary embodiments of the disclosure. The semiconductor package 10Adepicted in FIG. 1 to FIG. 14 are similar to the semiconductor package40A depicted in FIG. 25 to FIG. 29, and one of the differences is that,for the semiconductor package 40A depicted in FIG. 25 to FIG. 29, theintegrated circuit component 130 is replaced with the integrated circuitcomponent 130″. The elements similar to or substantially the same as theelements described above will use the same reference numbers, andcertain details or descriptions of the same elements and therelationship thereof (e.g. the relative positioning configuration andelectrical connection) will not be repeated herein. In some embodiments,prior to or after the formation of the conductive pillars 120 in FIG. 1,an integrated circuit component 130″ is disposed on the carrier 112instead of the integrated circuit component 130, and then the previouslydescribed manufacturing process as described in FIG. 2 to FIG. 6 andFIG. 25 to FIG. 29 above can be performed to obtain the semiconductorpackage 40A depicted in FIG. 29.

In some embodiments, the integrated circuit component 130″ is similar tothe integrated circuit component 130. The integrated circuit component130″ has the semiconductor substrate 131, the interconnection structure132, the connecting pads 133, the connecting pillars 134, the protectionlayer 135 and has none of the TSVs 136 and the liners 137, for example.

Referring to FIG. 25, in some embodiments, the semiconductor package 40Ais flipped (turned upside down) and placed on the carrier 312, and thecarrier 112 is debonded from the buffer layer 116, following the processas described in FIG. 6. In some embodiments, the buffer layer 116 iseasily separated from the carrier 112 due to the debond layer 114, andthe buffer layer 116 is exposed. In some embodiments, the carrier 112 isdetached from the buffer layer 116 through a debonding process, and thecarrier 112 and the debond layer 114 are removed. As shown in FIG. 25, asurface of the connecting film 140 facing away from the backside 130 bof the integrated circuit component 130″ is substantially levelled withthe bottom surfaces 120 b of the conductive pillars 120. In the words,the surface of the connecting film 140 facing away from the backside 130b of the integrated circuit component 130″ is coplanar to the bottomsurfaces 120 b of the conductive pillars 120.

Referring to FIG. 26, in some embodiments, the buffer layer 116 ispatterned to form a plurality of contact openings 116 a in the bufferlayer 116 exposing the bottom surfaces 120 b of the conductive pillars120. The number of the contact openings 116 a may correspond to thenumber of the conductive pillars 120. In some embodiments, the contactopenings 116 a in the buffer layer 116 are formed by laser drillingprocess or other suitable processes. The disclosure is not limitedthereto.

In some embodiments, as shown in FIG. 26, a maximum length L3 of thecontact openings 116 a may approximately range from 7 μm to 20 μm. In analternative embodiment, the maximum length L3 may approximately rangefrom 20 μm to 100 μm. In an alternative embodiment, the maximum lengthL3 may be approximately above 100 μm. In some embodiments, a height H4of the buffer layer 116 may approximately range from 1 μm to 10 μm. Inan alternative embodiment, the height H4 may approximately range from 10μm to 50 μm.

Referring to FIG. 27, in some embodiments, the conductive patterns 230and the plurality of conductive elements 240 is disposed on the bufferlayer 116. As shown in FIG. 27, in some embodiments, the conductivepatterns 230 are directly disposed on the bottom surfaces 120 b of theconductive pillars 120 by penetrating through the contact opening 116 aformed in the buffer layer 116. In some embodiments, some of theconductive elements 240 are electrically connected to the integratedcircuit component 130″ through some of the conductive patterns 230, theconductive pillars 120, and the redistribution circuit structure 170. Insome embodiments, some of the conductive elements 240 are electricallyconnected to the semiconductor device 200 a and the semiconductor device200 b through some of the conductive patterns 230, the conductivepillars 120, the redistribution circuit structure 170, and theconnectors 180. As shown in FIG. 27, the semiconductor device 200 a andthe semiconductor device 200 b are electrically connected to theintegrated circuit component 130″ through the connectors 180 and theredistribution circuit structure 170, such that the semiconductor device200 a and the semiconductor device 200 b are electrically communicatedto each other through the integrated circuit component 130″. The numbersof the conductive patterns 230 and the conductive elements 240 maycorrespond to the number of the conductive pillars 120. The disclosureis not limited thereto. The materials of the conductive patterns 230 andthe conductive elements 240 and formation methods thereof are similar tothe processes for forming the conductive patterns 230 and the conductiveelements 240 as described in FIG. 12, and thus may not be repeatedherein.

Referring to FIG. 28, in some embodiments, the carrier 312 is flipped(turned upside down) and then debonded from the semiconductor device 200a, the semiconductor device 200 b, and the insulating encapsulation 220.In some embodiments, the carrier 312 is detached from the semiconductordevice 200 a, the semiconductor device 200 b, and the insulatingencapsulation 220 through a debonding process, where the carrier 312 isremoved, and the semiconductor device 200 a, the semiconductor device200 b, and the insulating encapsulation 220 are exposed. During thedebonding step, a holding device 314 is adopted to secure thesemiconductor package 40A before debonding the carrier 312. As shown inFIG. 28, for example, the holding device 314 may be an adhesive tape, anadhesive carrier or a suction pad.

Referring to FIG. 29, in some embodiments, the conductive elements 240is released from the holding device 314 to form the semiconductorpackage 40A. In some embodiments, a dicing process is performed to cutthe wafer having a plurality of the semiconductor packages 40A intoindividual and separated semiconductor packages 40A. In one embodiment,the dicing process is a wafer dicing process including mechanical bladesawing or laser cutting. Up to here, the manufacture of thesemiconductor package 40A is completed.

As shown in FIG. 29, the buffer layer 116 is remained in thesemiconductor package 40A, where the buffer layer 116 prevents anypossible damage(s) occurring on the conductive pillars 120; and inaddition, the buffer layer 116 may further act as a passivation layerhaving a high degree of planarization and evenness, which is beneficialfor later-formed components (such as the conductive patterns 230, etc).

FIG. 30 is a schematic cross-sectional view of a semiconductor packagein accordance with some exemplary embodiments of the disclosure.Referring to FIG. 29 and FIG. 30 together, the semiconductor package 40Adepicted in FIG. 29 and the semiconductor package 40B depicted in FIG.30 are similar; such that the elements similar to or substantially thesame as the elements described above will use the same referencenumbers, and certain details or descriptions of the same elements andthe relationship thereof (e.g. the relative positioning configurationand electrical connection) will not be repeated herein. Referring toFIG. 29 and FIG. 30 together, the difference is that, for thesemiconductor package 40B depicted in FIG. 30, the height Ta of thesemiconductor device 200 a is different from the height Tb of thesemiconductor device 200 b. As shown in FIG. 30, for example, the heightTa of the semiconductor device 200 a is less than the height Tb of thesemiconductor device 200 b.

However, the disclosure is not limited thereto, in an alternativeembodiment (not shown), the height Ta of the semiconductor device 200 amay be greater than the height Tb of the semiconductor device 200 b.

FIG. 31 is a schematic cross-sectional view of a semiconductor packagein accordance with some exemplary embodiments of the disclosure. FIG. 32is a schematic enlarged cross-sectional view illustrating a part of thesemiconductor package depicted in FIG. 31, where FIG. 32 illustrates anenlarged cross-sectional view of a portion of the semiconductor packagedepicted in FIG. 31 indicated by a dotted box C. FIG. 33 is a schematicenlarged cross-sectional view illustrating a part of the semiconductorpackage in accordance with some exemplary embodiments of the disclosure.FIG. 34 is a schematic enlarged cross-sectional view illustrating a partof the semiconductor package in accordance with some exemplaryembodiments of the disclosure. FIG. 35 is a schematic enlargedcross-sectional view illustrating a part of the semiconductor package inaccordance with some exemplary embodiments of the disclosure. In FIG. 32to FIG. 35, only certain structural features including the buffer layer116, the conductive pillars 120, the integrated circuit component 130″,the insulating encapsulation 160, the redistribution circuit structure170, and the conductive patterns 230 are stressed for illustrationpurposes, and only two conductive pillars 120 are illustrated for easyillustration.

Referring to FIG. 29 and FIG. 31 together, the semiconductor package 40Adepicted in FIG. 29 and the semiconductor package 40C depicted in FIG.31 are similar, the difference is that, for the semiconductor package40C depicted in FIG. 31, an additional element, e.g. an insulatingencapsulation 150, is further formed to warp at least a sidewall 130S ofthe integrated circuit component 130″. The elements similar to orsubstantially the same as the elements described above will use the samereference numbers, and certain details or descriptions of the sameelements and the relationship thereof (e.g. the relative positioningconfiguration and electrical connection) will not be repeated herein.

Referring to FIG. 31, in some embodiments, prior to the formation of theinsulating encapsulation 160 described in FIG. 2, an insulatingencapsulation 150 is formed over the carrier 112, and then thepreviously described manufacturing process as described in FIG. 2 toFIG. 6 and FIG. 25 to FIG. 29 above can be performed to obtain thesemiconductor package 40C depicted in FIG. 31.

In some embodiments, a top surface 150 a of the insulating encapsulation150 is substantially levelled with the top surface 160 a of theinsulating encapsulation 160 and the top surfaces 120 a of theconductive pillars 120, and a bottom surface 150 b of the insulatingencapsulation 150 is substantially levelled with the bottom surface 160b of the insulating encapsulation 160, the bottom surfaces 120 b of theconductive pillars 120, and the surface of the connecting film 140facing away from the backside 130 b of the integrated circuit component130″. In other words, the top surface 150 a of the insulatingencapsulation 150 is coplanar to the top surface 160 a of the insulatingencapsulation 160 and the top surfaces 120 a of the conductive pillars120, and the bottom surface 150 b of the insulating encapsulation 150 iscoplanar to the bottom surface 160 b of the insulating encapsulation160, the bottom surfaces 120 b of the conductive pillars 120, and thesurface of the connecting film 140 facing away from the backside 130 bof the integrated circuit component 130″, as shown in FIG. 31.

Due to the insulating encapsulation 150, the adhesion degree of theintegrated circuit component 130″ and the buffer layer 116 is furtherenhanced. In the disclosure, the material of the insulatingencapsulation 150 is different from the material of the insulatingencapsulation 160. That is, the sidewall 150S of the insulatingencapsulation 150 is referred as an interface of the insulatingencapsulation 150 and the insulating encapsulation 160, where theinterface is clearly shown in FIG. 31. The material the insulatingencapsulation 150 and formation method thereof are similar to theprocesses for forming the insulating encapsulation 150 as described inFIG. 17, and thus may not be repeated herein.

In an example, as shown in FIG. 31 and FIG. 32, some of the conductivepillars 120 and the integrated circuit component 130″ are encapsulatedin the insulating encapsulation 150, and some of the conductive pillars120 are encapsulated in the insulating encapsulation 160.

Referring to FIG. 32, the conductive pillars 120 includes at least onefirst conductive pillar 120A and at least one second conductive pillar120B. In some embodiments, the first conductive pillar 120A isencapsulated in the insulating encapsulation 150, where a sidewall 120ASof the first conductive pillar 120A is covered by the insulatingencapsulation 150, such that the first conductive pillar 120A isseparated from the insulating encapsulation 160 by the insulatingencapsulation 150. In other words, the first conductive pillar 120A issurrounded by and in contact with the insulating encapsulation 150 andis free of the insulating encapsulation 160. In some embodiments, thesecond conductive pillar 120B is encapsulated in the insulatingencapsulation 160, where a sidewall 120BS of the second conductivepillar 120B is covered by the insulating encapsulation 160, such thatthe second conductive pillar 120B is separated from the insulatingencapsulation 150 by the insulating encapsulation 160. In other words,the second conductive pillar 120B is surrounded by and in contact withthe insulating encapsulation 160 and is free of the insulatingencapsulation 150. As shown in FIG. 32, the first conductive pillar 120Apenetrates the insulating encapsulation 150, and the second conductivepillar 120B penetrates the insulating encapsulation 160.

In certain embodiments, as shown in FIG. 32, the sidewall 150S and thebottom surface 150 b of the insulating encapsulation 150 constitute anangle θ1, where the angle θ1 is an acute angle. In one embodiment, arange of the angle θ1 is about from 0.5° to 30°, however the disclosureis not limited thereto. In an alternative embodiment, the range of theangle θ1 is about from 30° to 60°. In an alternative embodiment, therange of the angle θ1 is about from 60° to 85°. The disclosure is notlimited thereto.

In some embodiments, a maximum lateral width W1 from the sidewall 150Sof the insulating encapsulation 150 to the sidewall 130S of theintegrated circuit component 130″ may range approximately from 10 μm to100 μm, however the disclosure is not limited thereto. In an alternativeembodiment, the maximum lateral width W1 may range approximately from100 μm to 500 μm. In an alternative embodiment, the maximum lateralwidth W1 may be approximately above 500 μm.

In some embodiments, a maximum lateral distance d from the sidewall 150Sof the insulating encapsulation 150 to the sidewall 120BS of the secondconductive pillar 120B (e.g. the conductive pillar(s) 120 not covered bythe insulating encapsulation 150) may range approximately from 5 μm to100 μm, however the disclosure is not limited thereto. In an alternativeembodiment, the maximum lateral distance d may range approximately from100 μm to 500 μm. In an alternative embodiment, the maximum lateraldistance d may be approximately above 500 μm.

Additionally, some various modifications of the configurationrelationship of the conductive pillars 120, the insulating encapsulation150, and the insulating encapsulation 160 are shown in FIG. 33 to FIG.35. However, the disclosure is not limited thereto.

Referring to FIG. 33, the conductive pillars 120 includes at least twofirst conductive pillars 120A. In some embodiments, the first conductivepillars 120A are encapsulated in the insulating encapsulation 150, wherethe sidewalls 120AS of the first conductive pillars 120A are covered bythe insulating encapsulation 150, such that the first conductive pillars120A are separated from the insulating encapsulation 160 by theinsulating encapsulation 150. In other words, the first conductivepillars 120A are surrounded by and in contact with the insulatingencapsulation 150 and are free of the insulating encapsulation 160. Asshown in FIG. 33, the first conductive pillars 120A penetrate theinsulating encapsulation 150.

Referring to FIG. 34, the conductive pillars 120 includes at least twosecond conductive pillars 120B. In some embodiments, the secondconductive pillars 120B are encapsulated in the insulating encapsulation160, where the sidewalls 120BS of the second conductive pillars 120B arecovered by the insulating encapsulation 160, such that the secondconductive pillars 120B are separated from the insulating encapsulation150 by the insulating encapsulation 160. In other words, the secondconductive pillars 120B are surrounded by and in contact with theinsulating encapsulation 160 and are free of the insulatingencapsulation 150. As shown in FIG. 34, the second conductive pillars120B penetrate the insulating encapsulation 160.

In the disclosure, the angle θ1, the maximum lateral width W1, and/orthe maximum lateral distance d described in FIG. 32 also applied to theangle θ1, the maximum lateral width W1, and/or the maximum lateraldistance d depicted in FIG. 33 and FIG. 34 and thus will not be repeatedherein.

Referring to FIG. 35, the conductive pillars 120 includes at least onefirst conductive pillar 120A and at least one third conductive pillar120C. In some embodiments, the first conductive pillar 120A isencapsulated in the insulating encapsulation 150, where the sidewall120AS of the first conductive pillar 120A is covered by the insulatingencapsulation 150, such that the first conductive pillar 120A isseparated from the insulating encapsulation 160 by the insulatingencapsulation 150. In other words, the first conductive pillar 120A issurrounded by and in contact with the insulating encapsulation 150 andis free of the insulating encapsulation 160. As shown in FIG. 35, thefirst conductive pillar 120A penetrates the insulating encapsulation150. In some embodiments, the third conductive pillar 120C isencapsulated in the insulating encapsulating 150 and the insulatingencapsulation 160, where the sidewall 120CS of the third conductivepillar 120C is partially covered by the insulating encapsulation 150 andis partially covered by the insulating encapsulation 160. In otherwords, the third conductive pillar 120C is surrounded by and in contactwith the insulating encapsulation 150 and the insulating encapsulation160, simultaneously. As shown in FIG. 35, the third conductive pillar120C penetrates the interface (e.g., the sidewall 150S) of theinsulating encapsulation 150 and the insulating encapsulation 160.

In some embodiments, an angle θ2 is between the interface (e.g., thesidewall 150S) of the insulating encapsulation 150 and the insulatingencapsulation 160 and the sidewall 120CS of the third conductive pillar120C, where the angle θ2 is an acute angle. In one embodiment, a rangeof the angle θ2 is about from 1° to 30°. In an alternative embodiment,the range of the angle θ2 is about from 30° to 60°. In an alternativeembodiment, the range of the angle θ2 is about from 60° to 89°.

In some embodiments, an angle θ3 is between the interface (e.g., thesidewall 150S) of the insulating encapsulation 150 and the insulatingencapsulation 160 and the top surface 160 a of the insulatingencapsulation 160, where the angle θ3 is an acute angle (e.g.θ3=90°−θ2).

In some embodiments, a maximum lateral width W2 measured from thesidewall 150S of the insulating encapsulation 150 to the sidewall 120CSof the third conductive pillar 120C (e.g. the conductive pillar(s) 120penetrating the interface of two different insulating encapsulations)may approximately range from 10 μm to 100 μm, however the disclosure isnot limited thereto. In an alternative embodiment, the maximum lateralwidth W2 may approximately range from 100 μm to 500 μm. In analternative embodiment, the maximum lateral width W2 may beapproximately above 500 μm.

In an alternative embodiment (not shown), the conductive pillars 120 mayinclude at least one second conductive pillar 120B and at least onethird conductive pillar 120C, and the second conductive pillar 120Bpenetrates the insulating encapsulation 160 while the third conductivepillar 120C penetrates the interface of the insulating encapsulation 150and the insulating encapsulation 160. In an alternative embodiment (notshown), the conductive pillars 120 may include at least one firstconductive pillar 120A, at least one second conductive pillar 120B andat least one third conductive pillar 120C, and the first conductivepillar 120A and the second conductive pillar 120B respectively penetratethe insulating encapsulation 150 and the insulating encapsulation 160while the third conductive pillar 120C penetrates the interface of theinsulating encapsulation 150 and the insulating encapsulation 160. Theabove not shown embodiments may have the similar specifications of theangles θ1˜θ3, the maximum lateral widths W1˜W2, and/or the maximumlateral distance d described in FIG. 32 to FIG. 35. The disclosure isnot limited thereto.

FIG. 36 is a schematic cross-sectional view of a semiconductor packagein accordance with some exemplary embodiments of the disclosure.Referring to FIG. 31 and FIG. 36 together, the semiconductor package 40Cdepicted in FIG. 31 and the semiconductor package 40D depicted in FIG.36 are similar; such that the elements similar to or substantially thesame as the elements described above will use the same referencenumbers, and certain details or descriptions of the same elements andthe relationship thereof (e.g. the relative positioning configurationand electrical connection) will not be repeated herein.

Referring to FIG. 31 and FIG. 36 together, the difference is that, forthe semiconductor package 40D depicted in FIG. 36, the height Ta of thesemiconductor device 200 a is different from the height Tb of thesemiconductor device 200 b. As shown in FIG. 36, the height Ta of thesemiconductor device 200 a is less than the height Tb of thesemiconductor device 200 b. However the disclosure is not limitedthereto; in an alternative embodiment (not shown), the height Ta of thesemiconductor device 200 a may be greater than the height Tb of thesemiconductor device 200 b.

According to some embodiments, a semiconductor package including aninsulating encapsulation, an integrated circuit component, andconductive elements is provided. The integrated circuit component isencapsulated in the insulating encapsulation, wherein the integratedcircuit component has at least one through silicon via protruding fromthe integrated circuit component. The conductive elements are located onthe insulating encapsulation, wherein one of the conductive elements isconnected to the at least one through silicon via, and the integratedcircuit component is electrically connected to the one of the conductiveelements through the at least one through silicon via.

According to some embodiments, a semiconductor package including aninsulating encapsulation, at least one integrated circuit component, atleast two semiconductor devices, a plurality of conductive pillars andconductive elements is provided. The at least one integrated circuitcomponent is encapsulated in the insulating encapsulation. The at leasttwo semiconductor devices are disposed on the at least one integratedcircuit component and electrically communicate to each other through theat least one integrated circuit component. The plurality of conductivepillars is encapsulated in the insulating encapsulation and electricallyconnected to the at least two semiconductor devices. The conductiveelements are respectively electrically connected to the plurality ofconductive pillars, wherein the plurality of conductive pillars islocated between the conductive elements and the at least twosemiconductor devices.

According to some embodiments, a method of fabricating a semiconductorpackage is provided with the following steps, providing at least oneintegrated circuit component comprising a semiconductor substrate, aninterconnection structure disposed on a first surface of thesemiconductor substrate, and at least one through silicon via embeddedin the semiconductor substrate and connected to the interconnectionstructure; laterally encapsulating the at least one integrated circuitcomponent with an insulating encapsulation; providing at least twosemiconductor devices and forming connectors between the at least oneintegrated circuit component and at least two semiconductor devices toelectrically communicate the at least two semiconductor devicestherebetween through the at least one integrated circuit component andthe connectors; partially removing a portion of the semiconductorsubstrate to reveal the at least one through silicon via, such that aportion of the at least one through silicon via protrudes from a secondsurface of the semiconductor substrate, wherein the second surface isopposite to the first surface; forming conductive elements on theinsulating encapsulation, wherein one of the conductive elements isconnected to the portion of the at least one through silicon viaprotruding from the second surface of the semiconductor substrate.

According to some embodiments, a semiconductor package including aninsulating encapsulation, an integrated circuit component and at leasttwo semiconductor device is provided. The insulating encapsulation has afirst side and a second side opposite to the first side. The integratedcircuit component is encapsulated in the insulating encapsulation andhas a top surface exposed by the first side of the insulatingencapsulation, wherein the integrated circuit component has at least onethrough silicon via protruding out of the integrated circuit componentfrom a bottom surface thereof, and a surface of the at least one throughsilicon via protruding out of the integrated circuit component issubstantially levelled with the second side of the insulatingencapsulation. The at least two semiconductor devices are located overthe top surface of the integrated circuit component and electricallycommunicate to each other through the integrated circuit component.

According to some embodiments, a semiconductor package including aninsulating encapsulation, at least one integrated circuit component, atleast two semiconductor devices and a glue material is provided. Theinsulating encapsulation has a first side and a second side opposite tothe first side. The at least one integrated circuit component has afirst surface and a second surface opposite to the first surface and isencapsulated in the insulating encapsulation, wherein the first surfaceof the at least one integrated circuit component is substantiallylevelled with the first side of the insulating encapsulation. The atleast two semiconductor devices are located over the first side of theinsulating encapsulation and electrically communicate to each otherthrough the at least one integrated circuit component. The glue materialcovers the at least one integrated circuit component and separates theat least one integrated circuit component from the insulatingencapsulation, wherein the glue material has a third surfacesubstantially levelled with the first side of the insulatingencapsulation and a fourth surface substantially levelled with thesecond side of the insulating encapsulation, the third surface isopposite to the fourth surface, and a lateral size of the third surfacein a cross-section is smaller than a lateral size of the fourth surfacein the cross-section.

According to some embodiments, a semiconductor package including aninsulating encapsulation, a first semiconductor die, a secondsemiconductor die, and semiconductor devices is provided. The firstsemiconductor die and the second semiconductor die are embedded in theinsulating encapsulation, the first semiconductor die has a substrateand through vias penetrating through the substrate. The semiconductordevices are located over the first side of the insulating encapsulationand electrically communicate to each other through one of the firstsemiconductor die and the second semiconductor die.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the disclosure.Those skilled in the art should appreciate that they may readily use thedisclosure as a basis for designing or modifying other processes andstructures for carrying out the same purposes and/or achieving the sameadvantages of the embodiments introduced herein. Those skilled in theart should also realize that such equivalent constructions do not departfrom the spirit and scope of the disclosure, and that they may makevarious changes, substitutions, and alterations herein without departingfrom the spirit and scope of the disclosure.

What is claimed is:
 1. A semiconductor package, comprising: anintegrated circuit component in an insulating encapsulation; at leasttwo semiconductor devices, disposed over the insulating encapsulationand the integrated circuit component and electrically communicating tothe integrated circuit component; a plurality of conductive pillars inthe insulating encapsulation adjacent to the integrated circuitcomponent and electrically connected to the at least two semiconductordevices; a redistribution circuit structure, located between theinsulating encapsulation and the at least two semiconductor devices; andan epoxy polymer material, formed between and in contact with theintegrated circuit component and at least one of the plurality ofconductive pillars, wherein a third surface of the epoxy polymermaterial is coplanar with a fifth surface of the insulatingencapsulation and a seventh surface of the at least one of the pluralityof conductive pillars, and a fourth surface of the epoxy polymermaterial is coplanar with a sixth surface of the insulatingencapsulation and an eighth surface of the at least one of the pluralityof conductive pillars, wherein the third surface is opposite to thefourth surface, the fifth surface is opposite to the sixth surface, andthe seventh surface is opposite to the eighth surface.
 2. Thesemiconductor package of claim 1, wherein the epoxy polymer materialsurrounds the integrated circuit component and covers a sidewall of theintegrated circuit component.
 3. The semiconductor package of claim 2,wherein the epoxy polymer material further covers a sidewall of the atleast one of the plurality of conductive pillars.
 4. The semiconductorpackage of claim 3, wherein a sidewall of one of the plurality ofconductive pillars is partially covered by the epoxy polymer material.5. The semiconductor package of claim 3, wherein the epoxy polymermaterial further covers sidewalls of the plurality of conductivepillars.
 6. The semiconductor package of claim 1, wherein the insulatingencapsulation surrounds the epoxy polymer material and covers a sidewallof the epoxy polymer material.
 7. The semiconductor package of claim 6,wherein the insulating encapsulation further covers a sidewall of the atleast one of the plurality of conductive pillars.
 8. The semiconductorpackage of claim 6, wherein a sidewall of the at least one of theplurality of conductive pillars is free from the insulatingencapsulation.
 9. The semiconductor package of claim 1, wherein theintegrated circuit component comprises a semiconductor substrate andconnecting pillars disposed thereon, wherein the integrated circuitcomponent has a first surface distributed with the connecting pillarsand a second surface comprising a surface of the semiconductorsubstrate, and the first surface is opposite to the second surface alonga stacking direction of the semiconductor substrate and the connectingpillars, wherein the first surface of the integrated circuit componentis facing the at least two semiconductor devices, and the second surfaceof the integrated circuit component is between the third surface and thefourth surface of the epoxy polymer material along the stackingdirection and is free from the insulating encapsulation, wherein thesemiconductor package further comprises: an additional insulatingencapsulation, surrounding the at least two semiconductor devices andlocated at a side of the redistribution circuit structure opposing tothe insulating encapsulation; first conductive terminals, located on aside of the insulating encapsulation, wherein some of the firstconductive terminals are electrically connected to the integratedcircuit component, and the integrated circuit component is locatedbetween the first conductive terminals and the redistribution circuitstructure; and second conductive terminals, located between andelectrically connected to the at least two semiconductor devices and theredistribution circuit structure.
 10. A semiconductor package,comprising: an integrated circuit component in a first insulatingencapsulation; semiconductor devices, disposed over the first insulatingencapsulation and the integrated circuit component and electricallycommunicating to the integrated circuit component; a plurality ofconductive pillars in the first insulating encapsulation adjacent to theintegrated circuit component and electrically connected to thesemiconductor devices; a second insulating encapsulation encapsulatingthe semiconductor devices, wherein a sidewall of the second insulatingencapsulation is aligned with a sidewall of the first insulatingencapsulation; a redistribution circuit structure, located between thefirst insulating encapsulation and the second insulating encapsulation;and a first epoxy polymer material, laterally covering the integratedcircuit component and disposed between the first insulatingencapsulation and the integrated circuit component, wherein the firstepoxy polymer material is in contact with the integrated circuitcomponent and at least one of the plurality of conductive pillars,wherein a third surface of the first epoxy polymer material is coplanarwith a fifth surface of the first insulating encapsulation and a seventhsurface of at least one of the plurality of conductive pillars, and afourth surface of the first epoxy polymer material is coplanar with asixth surface of the first insulating encapsulation and an eighthsurface of the at least one of the plurality of conductive pillars,wherein the third surface is opposite to the fourth surface, the fifthsurface is opposite to the sixth surface, and the seventh surface isopposite to the eighth surface.
 11. The semiconductor package of claim10, wherein a material of the first insulating encapsulation is the sameas a material of the second insulating encapsulation.
 12. Thesemiconductor package of claim 10, wherein a material of the firstinsulating encapsulation is different from a material of the secondinsulating encapsulation.
 13. The semiconductor package of claim 10,wherein a surface of at least one of the semiconductor devices opposingto the integrated circuit component is covered by the second insulatingencapsulation.
 14. The semiconductor package of claim 10, whereinsurfaces of the semiconductor devices opposing to the integrated circuitcomponent is coplanar with a surface of the second insulatingencapsulation.
 15. The semiconductor package of claim 10, wherein theintegrated circuit component comprises a semiconductor substrate andconnecting pillars disposed thereon, wherein the integrated circuitcomponent has a first surface distributed with the connecting pillarsand a second surface comprising a surface of the semiconductorsubstrate, and the first surface is opposite to the second surface alonga stacking direction of the semiconductor substrate and the connectingpillars, wherein the first surface of the integrated circuit componentis facing the semiconductor devices, and the second surface of theintegrated circuit component is between the fifth surface and the sixthsurface of the first insulating encapsulation along the stackingdirection and is free from the first insulating encapsulation, whereinthe semiconductor package further comprises: first conductive terminals,disposed over and electrically connected to the integrated circuitcomponent and the plurality of conductive pillars; second conductiveterminals, located between and electrically connected to thesemiconductor devices and the redistribution circuit structure, whereinthe plurality of conductive pillars and the integrated circuit componentare located between the first conductive terminals and the secondconductive terminals; a second epoxy polymer material, disposed over theintegrated circuit component and sandwiched between sidewalls of thesemiconductor devices opposite to each other, wherein the second epoxypolymer material is located in the second insulating encapsulation. 16.A semiconductor package, comprising: an integrated circuit component ina first insulating encapsulation; at least two semiconductor devices,disposed over the first insulating encapsulation and electricallycommunicating to the integrated circuit component; a plurality ofconductive pillars in the first insulating encapsulation andelectrically connected to the at least two semiconductor devices; aredistribution circuit structure, located between the integrated circuitcomponent and the at least two semiconductor devices; a plurality ofconnectors, located between and electrically connected theredistribution circuit structure and the at least two semiconductordevices; an underfill, located between two adjacent semiconductordevices of the at least two semiconductor devices and coveringperimeters of the two adjacent semiconductor devices, wherein a lateralsize of a first side of the underfill is less than a lateral size of asecond side of the underfill, the second side is opposite to the firstside and in contact with the redistribution circuit structure; and anepoxy polymer material, formed between the integrated circuit componentand at least one of the plurality of conductive pillars, wherein a thirdsurface of the epoxy polymer material is coplanar with a fifth surfaceof the first insulating encapsulation and a seventh surface of the atleast one of the plurality of conductive pillars, and a fourth surfaceof the epoxy polymer material is coplanar with a sixth surface of thefirst insulating encapsulation and an eighth surface of the at least oneof the plurality of conductive pillars, wherein the third surface isopposite to the fourth surface, the fifth surface is opposite to thesixth surface, and the seventh surface is opposite to the eighthsurface.
 17. The semiconductor package of claim 16, wherein theunderfill covers the plurality of connectors.
 18. The semiconductorpackage of claim 16, wherein the underfill covers sidewalls of the atleast two semiconductor devices.
 19. The semiconductor package of claim16, wherein the integrated circuit component comprises a semiconductorsubstrate and connecting pillars disposed thereon, wherein theintegrated circuit component has a first surface distributed with theconnecting pillars and a second surface comprising a surface of thesemiconductor substrate, and the first surface is opposite to the secondsurface along a stacking direction of the semiconductor substrate andthe connecting pillars, wherein the first surface of the integratedcircuit component is facing the at least two semiconductor devices, andthe second surface of the integrated circuit component is between thefifth surface and the sixth surface of the first insulatingencapsulation along the stacking direction and is free from the firstinsulating encapsulation, wherein the semiconductor package furthercomprises: a second insulating encapsulation, surrounding the at leasttwo semiconductor devices and located at a side of the redistributioncircuit structure opposing to the first insulating encapsulation,wherein the second insulating encapsulation covers the underfill; andconductive terminals, located on a side of the first insulatingencapsulation opposing to the second insulating encapsulation, whereinsome of the conductive terminals are electrically connected to theintegrated circuit component, and the integrated circuit component islocated between the conductive terminals and the redistribution circuitstructure, wherein the second insulating encapsulation is located at aside of the redistribution circuit structure opposing to the firstinsulating encapsulation and laterally surrounds the at least twosemiconductor devices.
 20. The semiconductor package of claim 19,wherein a material of the second insulating encapsulation is differentfrom a material of the underfill.